FREQUENCY-VARIABLE ACOUSTIC THIN FILM RESONATOR, FILTER AND COMMUNICATION APPARATUS USING THE SAME
First Claim
1. A frequency-variable acoustic thin film resonator, comprising:
- a first piezoelectric thin film;
a pair of primary electrodes for applying an electric signal, which are formed on the first piezoelectric thin film;
a second piezoelectric thin film that is disposed so that an oscillation generated in the first piezoelectric thin film propagates to the second piezoelectric thin film;
a pair of secondary electrodes for outputting an electric signal, which are formed on the second piezoelectric thin film;
a load that is connected between the secondary electrodes; and
a control portion that controls a value of the load,whereby an acoustic thin film resonator element is formed so that an electric signal inputted from the primary electrodes is outputted from the secondary electrodes by a piezoelectric effect, anda resonant frequency and an antiresonant frequency are made variable through the control of the value of the load.
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Accused Products
Abstract
An acoustic thin film resonator including: a first piezoelectric thin film 101; a pair of primary electrodes 103 and 104 for applying an electric signal, which are formed on the first piezoelectric thin film; a second piezoelectric thin film 102 that is disposed so that an oscillation generated in the first piezoelectric thin film propagates to the second piezoelectric thin film; a pair of secondary electrodes 104 and 105 for outputting an electric signal, which are formed on the second piezoelectric thin film; a load 108 that is connected between the secondary electrodes; and a control portion 109 that controls a value of the load. Thereby, an acoustic thin film resonator element is formed so that an electric signal inputted from the primary electrodes is outputted from the secondary electrodes by a piezoelectric effect, and a resonant frequency and an antiresonant frequency are made variable through the control of the value of the load. A resonant frequency and an antiresonant frequency are made variable at the same time without resonant characteristics being deteriorated.
32 Citations
18 Claims
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1. A frequency-variable acoustic thin film resonator, comprising:
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a first piezoelectric thin film; a pair of primary electrodes for applying an electric signal, which are formed on the first piezoelectric thin film; a second piezoelectric thin film that is disposed so that an oscillation generated in the first piezoelectric thin film propagates to the second piezoelectric thin film; a pair of secondary electrodes for outputting an electric signal, which are formed on the second piezoelectric thin film; a load that is connected between the secondary electrodes; and a control portion that controls a value of the load, whereby an acoustic thin film resonator element is formed so that an electric signal inputted from the primary electrodes is outputted from the secondary electrodes by a piezoelectric effect, and a resonant frequency and an antiresonant frequency are made variable through the control of the value of the load. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13, 14, 15, 16, 17, 18)
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Specification