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MOVABLE BODY APPARATUS, EXPOSURE APPARATUS AND PATTERN FORMATION APPARATUS, AND DEVICE MANUFACTURING METHOD

  • US 20090273767A1
  • Filed: 12/10/2008
  • Published: 11/05/2009
  • Est. Priority Date: 12/11/2007
  • Status: Active Grant
First Claim
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1. A movable body apparatus, comprising:

  • a movable body that moves in at least one axial direction along a predetermined plane;

    a first measurement device that includes a moving grating which is arranged on the movable body and to which a first measurement light is irradiated along an optical path at least partially including a first optical path in the one axial direction, a fixed grating which is arranged outside the movable body and has a periodic direction in the one axial direction and to which a diffracted light generated at the moving grating is irradiated, and a photodetection system which receives a diffracted light from the fixed grating via the moving grating, and that measures positional information of the movable body in the one axial direction; and

    a second measurement device that measures positional information of the movable body in the one axial direction, by irradiating a reflection surface arranged on the movable body with a second measurement light along a second optical path in the one axial direction, which is close to or overlaps with the first optical path, and receiving a reflected light from the reflection surface.

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