MOVABLE BODY APPARATUS, EXPOSURE APPARATUS AND PATTERN FORMATION APPARATUS, AND DEVICE MANUFACTURING METHOD
First Claim
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1. A movable body apparatus, comprising:
- a movable body that moves in at least one axial direction along a predetermined plane;
a first measurement device that includes a moving grating which is arranged on the movable body and to which a first measurement light is irradiated along an optical path at least partially including a first optical path in the one axial direction, a fixed grating which is arranged outside the movable body and has a periodic direction in the one axial direction and to which a diffracted light generated at the moving grating is irradiated, and a photodetection system which receives a diffracted light from the fixed grating via the moving grating, and that measures positional information of the movable body in the one axial direction; and
a second measurement device that measures positional information of the movable body in the one axial direction, by irradiating a reflection surface arranged on the movable body with a second measurement light along a second optical path in the one axial direction, which is close to or overlaps with the first optical path, and receiving a reflected light from the reflection surface.
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Abstract
A movable body apparatus is equipped with a Y measuring system equipped with an encoder and an interferometer that measure the position of a stage in one axis (Y-axis) direction. The interferometer irradiates a reflection surface arranged on the stage with a measurement light close to a measurement light of the encoder, and receives its reflected light. In this case, the encoder and the interferometer commonly use an optical member fixed to the stage. Accordingly, the Y interferometer and the Y encoder have substantially the equal measurement axis.
41 Citations
66 Claims
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1. A movable body apparatus, comprising:
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a movable body that moves in at least one axial direction along a predetermined plane; a first measurement device that includes a moving grating which is arranged on the movable body and to which a first measurement light is irradiated along an optical path at least partially including a first optical path in the one axial direction, a fixed grating which is arranged outside the movable body and has a periodic direction in the one axial direction and to which a diffracted light generated at the moving grating is irradiated, and a photodetection system which receives a diffracted light from the fixed grating via the moving grating, and that measures positional information of the movable body in the one axial direction; and a second measurement device that measures positional information of the movable body in the one axial direction, by irradiating a reflection surface arranged on the movable body with a second measurement light along a second optical path in the one axial direction, which is close to or overlaps with the first optical path, and receiving a reflected light from the reflection surface. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13, 14, 36, 37, 38, 39, 40)
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15-35. -35. (canceled)
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41. A movable body apparatus, comprising:
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a movable body that moves in at least one axial direction along a predetermined plane; a first measurement device that measures positional information of the movable body in the one axial direction, by irradiating a fixed grating, which is arranged outside the movable body and has a periodic direction in the one axial direction, with a first measurement light along an optical path at least partially including a first optical path in the one axial direction, via a part of the movable body, and receiving a diffracted light from the fixed grating via the part of the movable body; and a second measurement device that measures positional information of the movable body in the one axial direction, by irradiating the part of the movable body with a second measurement light along a second optical path in the one axial direction and receiving a return light of the second measurement light from the movable body, wherein the first and second measurement devices each include a common optical member that constitutes the part of the movable body. - View Dependent Claims (42, 43, 44, 45, 46, 47, 48, 49, 50, 51, 52, 53, 54, 55, 56)
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57. A movable body apparatus, comprising:
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a movable body that moves in at least one axial direction along a predetermined plane; a first measurement device that measures positional information of the movable body in the one axial direction, by irradiating a first grating of the movable body or a first grating arranged outside the movable body via a part of the movable body, with a first measurement light along an optical path including a first optical path in the one axial direction that is headed to the movable body via an optical system, and receiving a diffracted light from the first grating; and a second measurement device that measures positional information of the movable body in the one axial direction, by irradiating the movable body with a second measurement light via at least a part of an optical member of the optical system, along a second optical path parallel to the first optical path and receiving a return light of the second measurement light from the movable body. - View Dependent Claims (58, 59, 60, 61, 62, 63, 64, 65, 66)
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Specification