ELECTROMECHANICAL SYSTEM HAVING A DIELECTRIC MOVABLE MEMBRANE
First Claim
1. An electromechanical device comprising:
- a partially reflective and partially transmissive layer; and
a movable functional element comprisinga patterned flexible dielectric layer configured to flex in response to voltages applied to the partially reflective and partially transmissive layer to move the functional element in a direction generally perpendicular to the partially reflective and partially transmissive layer; and
a reflective layer mechanically coupled to the flexible dielectric layer, the reflective layer situated between the flexible dielectric layer and the partially reflective and partially transmissive layer.
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Accused Products
Abstract
An electromechanical device includes a partially reflective and partially transmissive layer and a movable functional element. The movable functional element includes a patterned flexible dielectric layer and a reflective layer mechanically coupled to the flexible dielectric layer. The patterned flexible dielectric layer is configured to flex in response to voltages applied to the partially reflective and partially transmissive layer to move the functional element in a direction generally perpendicular to the partially reflective and partially transmissive layer. The reflective layer is situated between the flexible dielectric layer and the partially reflective and partially transmissive layer.
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Citations
21 Claims
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1. An electromechanical device comprising:
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a partially reflective and partially transmissive layer; and a movable functional element comprising a patterned flexible dielectric layer configured to flex in response to voltages applied to the partially reflective and partially transmissive layer to move the functional element in a direction generally perpendicular to the partially reflective and partially transmissive layer; and a reflective layer mechanically coupled to the flexible dielectric layer, the reflective layer situated between the flexible dielectric layer and the partially reflective and partially transmissive layer. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8)
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9. An electromechanical device comprising:
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an optical stack; a plurality of movable elements spaced from each other, each of the movable elements comprising a flexible dielectric layer that flexes in response to voltages applied to the optical stack to move the movable element towards the optical stack; and a reflective layer mechanically coupled to the flexible dielectric layer and situated between the flexible dielectric layer and the optical stack. - View Dependent Claims (10, 11, 12, 13, 14, 15)
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16. An electromechanical device comprising:
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a plurality of rows of actuation electrodes; a plurality of columns of functional elements substantially orthogonal to the plurality of rows of actuation electrodes and crossing the plurality of rows of actuation electrodes at a plurality of active areas, each of the columns of functional elements comprising a dielectric layer continuously extending along a length of the column, the dielectric layer configured to flex in response to voltages applied to the electrode at one of the active areas to move the functional element towards the actuation electrode of the one of the active areas; and a reflective layer continuously extending along the length of the column between the dielectric layer and the actuation electrodes. - View Dependent Claims (17, 18, 19, 20, 21)
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Specification