REDUCTION OF SUBSTRATE OPTICAL LEAKAGE IN INTEGRATED PHOTONIC CIRCUITS THROUGH LOCALIZED SUBSTRATE REMOVAL
First Claim
Patent Images
1. A structure comprising:
- a substrate having a recess defined therein;
a layer disposed over the recess, (i) the layer comprising a first cladding material and a second cladding material, and (ii) the recess and a bottom surface of the layer defining a chamber; and
a first optical waveguide disposed in the layer, the first optical waveguide having a first core including a first core material and (ii) a first guided mode,wherein (i) the first cladding material contacts the first core, the second cladding material contacts the substrate, and the first and second cladding materials are rigidly connected, (ii) the first core and at least one of the first and second cladding materials have an index contrast of greater than 10%, and (iii) a majority of the first guided mode is contained in the core and in at least one of the first cladding material and the second cladding material.
1 Assignment
0 Petitions
Accused Products
Abstract
Structures including optical waveguides disposed over substrates having a chamber or trench defined therein, and methods for formation thereof.
-
Citations
20 Claims
-
1. A structure comprising:
-
a substrate having a recess defined therein; a layer disposed over the recess, (i) the layer comprising a first cladding material and a second cladding material, and (ii) the recess and a bottom surface of the layer defining a chamber; and a first optical waveguide disposed in the layer, the first optical waveguide having a first core including a first core material and (ii) a first guided mode, wherein (i) the first cladding material contacts the first core, the second cladding material contacts the substrate, and the first and second cladding materials are rigidly connected, (ii) the first core and at least one of the first and second cladding materials have an index contrast of greater than 10%, and (iii) a majority of the first guided mode is contained in the core and in at least one of the first cladding material and the second cladding material. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9)
-
-
10. A structure comprising:
-
a substrate having a trench defined in a backside thereof, the trench having a cross-section defined by (i) a trench width defined by a distance between two opposing sidewall portions of the trench, and (ii) a trench height equal to at least 5 times the trench width; a first optical waveguide disposed over a top surface of the substrate and having (i) a first core comprising a first core material, and (ii) a first guided mode; a first cladding material in contact with the first core; and a second cladding material in contact with the substrate, wherein (i) the first core and at least one of the first and second cladding materials have an index contrast of greater than 10%, and (ii) a majority of the first guided mode is contained in the first core and in at least one of the first cladding material and the second cladding material. - View Dependent Claims (11)
-
-
12. A method for forming a structure, the method comprising:
-
defining an optical waveguide in a layer disposed over a substrate, the optical waveguide having a core material and a guided mode; defining an access port through the layer; and removing a portion of the substrate underneath the optical waveguide to form a recess in the substrate. - View Dependent Claims (13, 14, 15, 16, 17, 18, 19)
-
-
20. A method for forming a structure, the method comprising;
-
defining an optical waveguide in a layer disposed over a top surface of a substrate, the optical waveguide having a core material and a guided mode, the layer comprising a first cladding material and a second cladding material; and forming a trench in a backside of the substrate, the trench (i) having a cross-section defined by a width separating two sidewalls of the trench and a height, and (ii) terminating at a bottom surface of the layer beneath the optical waveguide.
-
Specification