Suspension apparatus and exposure apparatus

• US 20090274537A1
• Filed: 09/05/2008
• Published: 11/05/2009
• Est. Priority Date: 09/07/2007
• Status: Abandoned Application

• Current Assignee: Nikon Corporation
• Original Assignee: Nikon Corporation
• Inventors: Kato, Noriya
• Application Number:
  US12/230,848
• Publication Number:
  US 20090274537A1
• Time in Patent Office: Days
• US Class Current: 414/217.100
• CPC Class Codes: F16F 15/02 Suppression of vibrations of non-rotating, e.g. reciprocating systems; Suppression of vibrations of rotating systems by use of members not moving with the rotating systems F16F15/005 takes precedence ; layered products B32B; suppression of vibration in ships B63; relieving load on bearings, using magnetic means F16C39/06
• CPC Class Codes: G03F 7/70833 Mounting of optical systems, e.g. mounting of illumination system, projection system or stage systems on base-plate or ground
• CPC Class Codes: G03F 7/709 Vibration, e.g. vibration detection, compensation, suppression or isolation

Abstract

A suspension apparatus includes a linking component which is used to suspend and support an object. The linking component has a first member which is connected to the object, and a second member which is linked to the first member, and the first member and the second member are linked together such that a relative position of each in a first direction is regulated, while relative movement between the first member and the second member in a second direction which is different from the first direction is possible.

Claims

1. A suspension apparatus comprising:

a linking component which is used to suspend and support an object,

wherein the linking component comprises a first member which is connected to the object, and a second member which is linked to the first member, and

the first member and the second member are linked together such that a relative position of each in a first direction is regulated, while relative movement between the first member and the second member in a second direction which is different from the first direction is possible.

2. The suspension apparatus according to claim 1, wherein the first member and the second member are linked together so as to be capable of relatively moving with each other also in a third direction which is different from the first direction and the second direction.

3. The suspension apparatus according to claim 1, wherein the first member and the second member are linked so as to be in point contact with each other.

4. The suspension apparatus according to claim 1, wherein

one of the first member and the second member has a sliding bearing which has a spherical bearing surface, and

the other one of the first member and the second member has a spherical member which is supported by the bearing surface, and has a spherical surface whose diameter is smaller than a diameter of the spherical surface of the bearing surface.

5. The suspension apparatus according to claim 1, wherein the first member and the second member are linked so as to be in linear contact with each other.

6. The suspension apparatus according to claim 5, wherein at least one of the first member and the second member has a hinge mechanism.

7. The suspension apparatus according to claim 5, wherein the first member and the second member are linked via a bearing mechanism.

8. The suspension apparatus according to claim 1, wherein at least one of the first member and the second member has a rod-shaped portion.

9. The suspension apparatus according to claim 1, wherein there are three linking components.

10. The suspension apparatus according to claim 1, wherein the linking component comprises a third member which is linked to the second member, and the second member and the third member are linked together such that a relative position in the first direction are regulated, while relative movement between the second member and the third member in the second direction is possible.

11. The suspension apparatus according to claim 1, further comprising:

an air mount for supporting the linking component,

wherein the air mount comprises a housing member which forms a predetermined space, a movable member which is supported so as to be able to move in the first direction relative to the housing member and which a part of which penetrates an interior of the space and protrudes to an outside of the housing member, and a sealing member which is provided between the housing member and the movable member and which seals off the space, and

the movable member and the linking component are connected together.

12. The suspension apparatus according to claim 11, wherein the movable member is integrally connected to the third member of the linking component.

13. The suspension apparatus according to claim 1, wherein the object comprises a projection optical system.

14. The suspension apparatus according to claim 1, wherein the object is an interferometer.

15. The suspension apparatus according to claim 1, wherein the object comprises a measurement component which is provided with a measurement device.

16. An exposure apparatus which is provided with the suspension apparatus according to claim 1.