PLASMA REACTOR ELECTROSTATIC CHUCK HAVING A COAXIAL RF FEED AND MULTIZONE AC HEATER POWER TRANSMISSION THROUGH THE COAXIAL FEED
First Claim
1. A workpiece support pedestal for using within a plasma reactor chamber, said pedestal comprising:
- (A) an insulating puck having a workpiece support surface;
(B) a conductive plate underlying said puck, said puck containing electrical utilities and thermal media channels;
(C) an axially translatable coaxial RF path assembly underlying said conductive plate and comprising a center conductor, a grounded outer conductor and a tubular insulator separating said center and outer conductors, whereby said puck, plate and coaxial RF path assembly comprise a movable assembly;
(D) a lift servo coupled to said coaxial assembly for axial translation thereof;
(F) plural conduits extending axially through said center conductor and coupled to said thermal media utilities;
(G) plural electrical conductors extending axially through said tubular insulator and connected to said electrical utilities.
1 Assignment
0 Petitions
Accused Products
Abstract
A workpiece support pedestal includes an insulating puck having a workpiece support surface, a conductive plate underlying the puck, the puck containing electrical utilities and thermal media channels, and an axially translatable coaxial RF path assembly underlying the conductive plate. The coaxial RF path assembly includes a center conductor, a grounded outer conductor and a tubular insulator separating the center and outer conductors, whereby the puck, plate and coaxial RF path assembly comprise a movable assembly whose axial movement is controlled by a lift servo. Plural conduits extend axially through the center conductor and are coupled to the thermal media utilities. Plural electrical conductors extend axially through the tubular insulator and are connected to the electrical utilities.
188 Citations
18 Claims
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1. A workpiece support pedestal for using within a plasma reactor chamber, said pedestal comprising:
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(A) an insulating puck having a workpiece support surface; (B) a conductive plate underlying said puck, said puck containing electrical utilities and thermal media channels; (C) an axially translatable coaxial RF path assembly underlying said conductive plate and comprising a center conductor, a grounded outer conductor and a tubular insulator separating said center and outer conductors, whereby said puck, plate and coaxial RF path assembly comprise a movable assembly; (D) a lift servo coupled to said coaxial assembly for axial translation thereof; (F) plural conduits extending axially through said center conductor and coupled to said thermal media utilities; (G) plural electrical conductors extending axially through said tubular insulator and connected to said electrical utilities. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 18)
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11. A plasma reactor comprising:
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a chamber having a sidewall, a ceiling and a floor; an RF power source comprising an RF generator and an RF impedance match; a workpiece support pedestal within the chamber comprising; (A) an insulating puck having a workpiece support surface; (B) a conductive plate underlying said puck, said puck containing electrical utilities and thermal media channels; (C) an axially translatable coaxial RF path assembly underlying said conductive plate and comprising a center conductor having a top end contacting said conductive plate and a bottom end connected to said RF power source, a grounded outer conductor and a tubular insulator separating said center and outer conductors, whereby said puck, plate and coaxial RF path assembly comprise a movable assembly; (D) a lift servo coupled to said coaxial assembly for axial translation thereof; (F) plural conduits extending axially through said center conductor and coupled to said thermal media utilities; (G) plural electrical conductors extending axially through said tubular insulator and connected to said electrical utilities. - View Dependent Claims (12, 13, 14, 15, 16, 17)
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Specification