PROCESS OF MANUFACTURING LUMINESCENT DEVICE
First Claim
1. A method for manufacturing an electroluminescent device comprising:
- setting a substrate in a chamber;
forming an anode over the substrate;
forming an electroluminescence layer over the anode by repeatedly spreading a plurality of droplets of a composition which flows from a nozzle; and
forming a cathode over the electroluminescence layer,wherein the plurality of droplets of the composition are discharged so that the plurality of droplets are spread from the nozzle in different directions at one time,wherein a skirt is provided inside of the chamber and the skirt is provided around the nozzle, andwherein a heated nitrogen gas is discharged in the skirt to hit the plurality of droplets of the composition.
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Abstract
A method of forming a film consisted of an organic compound material at low cost using an organic compound material having the high luminescence efficiency is provided. The present invention is characterized by the fact that a layer containing an organic compound is formed on the substrate under the inactive gas atmosphere by spreading the colloidal solution (referred to as sol) in which an aggregate of organic compound is dispersed. Noted that in the present invention, an organic compound may be particulate that several pieces of organic compound is aggregated in the liquid, or may be an organic compound partially dissolved in the liquid. Moreover, according to the present invention, a metal thin film is formed using the colloidal solution in which a metal material having a small work function is dispersed on the layer containing an organic compound by a coat method and made it a cathode or one portion of a cathode.
86 Citations
40 Claims
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1. A method for manufacturing an electroluminescent device comprising:
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setting a substrate in a chamber; forming an anode over the substrate; forming an electroluminescence layer over the anode by repeatedly spreading a plurality of droplets of a composition which flows from a nozzle; and forming a cathode over the electroluminescence layer, wherein the plurality of droplets of the composition are discharged so that the plurality of droplets are spread from the nozzle in different directions at one time, wherein a skirt is provided inside of the chamber and the skirt is provided around the nozzle, and wherein a heated nitrogen gas is discharged in the skirt to hit the plurality of droplets of the composition. - View Dependent Claims (5, 6, 7, 8, 9, 10, 11, 12)
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2. A method for manufacturing an electroluminescent device comprising:
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setting a substrate in a chamber; forming an anode over the substrate; forming an electroluminescence layer over the anode by repeatedly spreading a plurality of droplets of a composition which flows from a nozzle; and forming a cathode over the electroluminescence layer, wherein a mask is set between the nozzle and the substrate and the electroluminescence layer is formed by making the composition pass through an opening portion of the mask, wherein the plurality of droplets of the composition are discharged so that the plurality of droplets are spread from the nozzle in different directions at one time, wherein a skirt is provided inside of the chamber and the skirt is provided around the nozzle, and wherein a heated nitrogen gas is discharged in the skirt to hit the plurality of droplets of the composition. - View Dependent Claims (13, 14, 15, 16, 17, 18, 19, 20)
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3. A method for manufacturing an electroluminescent device comprising:
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setting a substrate in a chamber; forming an anode over the substrate; forming an electroluminescence layer over the anode by repeatedly spreading a plurality of droplets of a composition which flows from a nozzle; and forming a cathode over the electroluminescence layer, wherein the composition is liquid having fluidity, and organic compound aggregates are dispersed as colloidal particulates in the liquid, wherein the plurality of droplets of the composition are discharged so that the plurality of droplets are spread from the nozzle in different directions at one time, wherein a skirt is provided inside of the chamber and the skirt is provided around the nozzle, and wherein a heated nitrogen gas is discharged in the skirt to hit the plurality of droplets of the composition. - View Dependent Claims (21, 22, 23, 24, 25, 26, 27, 28, 29, 30)
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4. A method for manufacturing an electroluminescent device comprising:
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setting a substrate in a chamber; forming an anode over the substrate; forming an electroluminescence layer over the anode by repeatedly spreading a plurality of droplets of a composition which flows from a nozzle; and forming a cathode over the electroluminescence layer, wherein a mask is set between the nozzle and the substrate and the electroluminescence layer is formed by making the composition pass through an opening portion of the mask, wherein the composition is liquid having fluidity, and organic compound aggregates are dispersed as colloidal particulates in the liquid, wherein the plurality of droplets of the composition are discharged so that the plurality of droplets are spread from the nozzle in different directions at one time, wherein a skirt is provided inside of the chamber and the skirt is provided around the nozzle, and wherein a heated nitrogen gas is discharged in the skirt to hit the plurality of droplets of the composition. - View Dependent Claims (31, 32, 33, 34, 35, 36, 37, 38, 39, 40)
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Specification