Process control system, process control method, and method of manufacturing electronic apparatus

• US 20090276078A1
• Filed: 07/10/2009
• Published: 11/05/2009
• Est. Priority Date: 06/21/2005
• Status: Active Grant

• Current Assignee: Kioxia Corporation
• Original Assignee: Kabushiki Kaisha Toshiba (Toshiba Corporation)
• Inventors: Sugamoto, Junji, Ushiku, Yukihiro, Harakawa, Shoichi, Akiyama, Kazutaka
• Granted Patent: US 7,831,330 B2
• Time in Patent Office: Days
• US Class Current: 700/121
• CPC Class Codes: G05B 19/41875 characterised by quality surveillance of production
• CPC Class Codes: G05B 2219/31477 Display correlated data so as to represent the degree of correlation
• CPC Class Codes: G05B 2219/32057 Control cell as function of correlation between stored and detected machine state
• CPC Class Codes: G05B 2219/32097 Recipe programming for flexible batch
• CPC Class Codes: G05B 2219/45031 Manufacturing semiconductor wafers
• CPC Class Codes: Y02P 90/02 Total factory control, e.g. smart factories, flexible manufacturing systems [FMS] or integrated manufacturing systems [IMS]

Abstract

A process control system includes a client computer which prepares a correlation between a reference monitored value of apparatus information and a feature quantity, a manufacturing execution system which prepares a processing recipe describing, as a first setting value in an actual manufacturing process, a value of the control parameter, an apparatus information collection section which collects an objective monitored value of the apparatus information in operation of the actual manufacturing process with the first setting value, a feature quantity calculation section which calculates a value of a feature quantity corresponding to the objective monitored value based on the correlation, a parameter calculation section which calculates a second setting value in the actual manufacturing process on the basis of the value of the feature quantity, and an apparatus control unit which changes the processing recipe with the second setting value being as a setting value of the second step.

Claims

1. A process control system comprising:

a client computer which prepares a correlation between a reference monitored value of apparatus information indicating a processing state of a manufacturing apparatus in a reference manufacturing process with respect to a reference wafer, and a feature quantity obtained from a control parameter for controlling the manufacturing apparatus and a finished form in the reference manufacturing process;

a manufacturing execution system which prepares a processing recipe describing, as a first setting value of a first step in an actual manufacturing process with respect to an objective wafer, a value of the control parameter calculated on the basis of a dimension of a processing objective structure in the actual manufacturing process;

an apparatus information collection section which collects an objective monitored value of the apparatus information from the manufacturing apparatus in operation of the actual manufacturing process with the first setting value;

a feature quantity calculation section which calculates a value of a feature quantity corresponding to the objective monitored value on the basis of the correlation;

a parameter calculation section which calculates a second setting value of a second step in the actual manufacturing process following the first step of the actual manufacturing process on the basis of the value of the feature quantity corresponding to the objective monitored value; and

an apparatus control unit which changes the processing recipe with the second setting value being as a setting value of the second step.

2. The process control system according to claim 1, wherein the apparatus control unit changes the processing recipe by adding an additional step to the first step when the second setting value is not acquired until the first step is completed.

3. The process control system according to claim 1, wherein the processing parameter includes a time, a temperature, a flow rate, and a pressure.

4. The process control system according to claim 1, wherein the finished form includes finished dimensions of a width and a depth of a pattern, a finished dimension of a thickness of the pattern, an angle of a sidewall of the pattern, and a line edge roughness of the pattern.

5-8. -8. (canceled)

9. A process control method comprising:

preparing, by a client computer, a correlation between a reference monitored value of apparatus information indicating a processing state of a manufacturing apparatus in a reference manufacturing process with respect to a reference wafer, and a feature quantity obtained from a control parameter for controlling the manufacturing apparatus and a finished form in the reference manufacturing process;

preparing, by a manufacturing execution system, a processing recipe describing, as a setting value of a first step in an actual manufacturing process with respect to an objective wafer, a first setting value of the control parameter calculated on the basis of a dimension of a processing objective structure in the actual manufacturing process;

collecting, by an apparatus information collection section, an objective monitored value of the apparatus information from the manufacturing apparatus in operation of the actual manufacturing process with the first setting value;

calculating, by a feature quantity calculation section, a value of a feature quantity corresponding to the objective monitored value on the basis of the correlation;

calculating, by a parameter calculation section, a second setting value of a second step in the actual manufacturing process following the first step in the actual manufacturing process on the basis of the value of the feature quantity corresponding to the objective monitored value; and

changing, by an apparatus control unit, the processing recipe with the second setting value being as a setting value of the second step.

10. The process control method according to claim 9, further comprising:

changing, by the apparatus control unit, the processing recipe by adding an additional step to the first step when the second setting value is not acquired until the first step is completed.

11. The process control method according to claim 9, wherein the processing parameter includes a time, a temperature, a flow rate, and a pressure.

12. The process control method according to claim 9, wherein the finished form includes finished dimensions of a width and a depth of a pattern, a finished dimension of a thickness of the pattern, an angle of a sidewall of the pattern, and a line edge roughness of the pattern.

13-16. -16. (canceled)

17. A method of manufacturing an electronic apparatus, comprising:

preparing, by executing a reference manufacturing process onto a reference wafer, a correlation between a reference monitored value of apparatus information indicating a processing state of a manufacturing apparatus, and a feature quantity obtained from a control parameter for controlling the manufacturing apparatus and a finished form in the reference manufacturing process;

preparing a processing recipe describing, as a first setting value of a first step in an actual manufacturing process with respect to an objective wafer, a value of the control parameter calculated on the basis of a dimension of a processing objective structure in the actual manufacturing process;

collecting an objective monitored value of the apparatus information from the manufacturing apparatus in operation of the actual manufacturing process with the first setting value;

calculating a value of a feature quantity corresponding to the objective monitored value on the basis of the correlation;

calculating a second setting value of a second step in the actual manufacturing process following the first step in the actual manufacturing process on the basis of the value of the feature quantity corresponding to the objective monitored value;

changing the processing recipe with the second setting value being as a setting value of the second step; and

processing the objective lot by the manufacturing apparatus.

18. The method of manufacturing an electronic apparatus according to claim 17, wherein the processing parameter includes a time, a temperature, a flow rate, and a pressure.

19-20. -20. (canceled)