×

METHOD OF PERFORMING MASK-WRITER TUNING AND OPTIMIZATION

  • US 20090276751A1
  • Filed: 04/02/2009
  • Published: 11/05/2009
  • Est. Priority Date: 04/14/2008
  • Status: Active Grant
First Claim
Patent Images

1. A method of tuning a first mask writer unit utilizing a reference mask writer unit, said first mask writer unit and said reference mask writer unit each having tunable parameters for controlling mask writing performance, said method comprising the steps of:

  • defining a test pattern and a mask writing model;

    generating said test pattern utilizing said reference mask writer unit and measuring the mask writing results;

    generating said test pattern utilizing said first mask writer unit and measuring the mask writing results;

    calibrating said mask writing model utilizing said mask writing results corresponding to said reference mask writer unit, said calibrated mask writing model having a first set of parameter values;

    tuning said calibrated mask writing model utilizing said mask writing results corresponding to said first mask writer unit, said tuned calibrated mask writing model having a second set of parameter values;

    adjusting said parameters of said first mask writer unit based on a difference between said first set of parameter values and said second set of parameter values.

View all claims
  • 2 Assignments
Timeline View
Assignment View
    ×
    ×