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Micromechanical Sensor, Sensor Array and Method

  • US 20090277271A1
  • Filed: 07/04/2006
  • Published: 11/12/2009
  • Est. Priority Date: 07/08/2005
  • Status: Active Grant
First Claim
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1. A micromechanical sensor for analyzing samples, comprising,a body,a planar wave guide portion spaced from the body,at least one electro-mechanical transducer element located on a lateral side of the wave guide portion for excitation of acoustic waves to the wave guide portion in response to electrical actuation, anda sample-receiving zone on one surface of the wave guide portion for receiving a sample,wherein the at least one of the transducer element is adapted to excite longitudinal bulk acoustic waves to the wave guide portion.

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