MULTIVARIATE FAULT DETECTION IMPROVEMENT FOR ELECTRONIC DEVICE MANUFACTURING

• US 20090282296A1
• Filed: 02/09/2009
• Published: 11/12/2009
• Est. Priority Date: 05/08/2008
• Status: Abandoned Application

• Current Assignee: Applied Materials Incorporated
• Original Assignee: Applied Materials Incorporated
• Inventors: LIN, Y. SEAN
• Application Number:
  US12/368,164
• Publication Number:
  US 20090282296A1
• Time in Patent Office: Days
• US Class Current: 714/46
• CPC Class Codes: G05B 23/024 Quantitative history assessment, e.g. mathematical relationships between available data; Functions therefor; Principal component analysis [PCA]; Partial least square [PLS]; Statistical classifiers, e.g. Bayesian networks, linear regression or correlation analysis; Neural networks

Abstract

An importance factor generator system for providing an overall importance factor to be used in normalizing variables for multivariate modeling. An importance factor generator system assigns a sensor importance factor (IF) to a sensor, where the sensor IF indicates the importance of the sensor relative to other sensors. The importance factor generator system assigns a recipe step IF to a recipe step, where the recipe step IF indicates the importance of the recipe step relative to other recipe steps. The importance factor generator system can calculate an overall IF using the sensor IF and recipe step IF and provide the overall IF to be used for normalizing variables for multivariate modeling results. The importance factor generator system can display the overall IF in a graphical user interface (GUI).

Claims

1. A computer-implemented method comprising:

assigning a sensor importance factor to one of a plurality of sensors, wherein the sensor importance factor indicates an importance of the one sensor relative to the plurality of sensors;

assigning a recipe step importance factor to one of a plurality of recipe steps, the one recipe step being associated with the one sensor, wherein the recipe step importance factor indicates an importance of the one recipe step relative to the plurality of recipe steps;

calculating an overall importance factor using the importance factor assigned to the one sensor and the importance factor assigned to the one recipe step associated with the one sensor; and

providing the overall importance factor for normalizing variables in generating multivariate model results.

2. The computer-implemented method of claim 1, wherein providing the overall importance factor includes displaying the overall importance factor in a graphical user interface (GUI).

3. The computer-implemented method of claim 1, wherein calculating the overall importance factor comprises calculating the overall importance factor as:

IF=IF.sensor*IF.step

where, IF.sensor is the sensor importance factor assigned to the one sensor, IF.step is the recipe step importance factor assigned to the one recipe step, and IF is the overall importance factor.

4. The computer-implemented method of claim 1, further comprising:

assigning a statistic importance factor to one of a plurality of statistics associated with the one sensor and the one recipe step, wherein the statistic importance factor indicates an importance of the one statistic relative to the plurality of statistics for the associated one sensor and the associated one recipe step; and

calculating an overall importance factor using the importance factor assigned to the one sensor, the importance factor assigned to the one recipe step, and the importance factor assigned to the one statistic.

5. The computer-implemented method of claim 4, wherein calculating the overall importance factor comprises calculating the overall importance factor as:

IF=IF.sensor*IF.step*IF.statistic

where, IF.sensor is the sensor importance factor assigned to the one sensor, IF.step is the recipe step importance factor assigned to the one recipe step, IF.statistic is the statistic importance factor assigned to the one statistic, and IF is the overall importance factor.

6. The computer-implemented method of claim 4, wherein assigning a statistic importance factor to one of a plurality of statistics comprises:

providing a default importance factor as an assigned importance factor for each of the plurality of statistics;

determining whether a statistic importance factor for one of the plurality of statistics is received; and

replacing the default importance factor for the one statistic with the received statistic importance factor as the assigned importance factor for the one statistic if a statistic importance factor for one of the plurality of statistics is received.

7. The computer-implemented method of claim 6, wherein a statistic importance factor for one of the plurality of statistics is received as a user input via a GUI.

8. The computer-implemented method of claim 1, wherein assigning a sensor importance factor to one of a plurality of sensors comprises:

providing a default importance factor as an assigned importance factor for each of the plurality of sensors;

determining whether a sensor importance factor for one of the plurality of sensors is received; and

replacing the default importance factor for the one sensor with the received sensor importance factor as the assigned importance factor for the one sensor if a sensor importance factor for one of the plurality of sensors is received.

9. The computer-implemented method of claim 8, wherein a sensor importance factor for one of the plurality of sensors is received as a user input via a graphical user interface (GUI).

10. The computer-implemented method of claim 1, wherein assigning a recipe step importance factor to one of a plurality of recipe steps comprises:

providing a default importance factor as an assigned importance factor for each of the plurality of recipe steps;

determining whether a recipe step importance factor for one of the plurality of recipe steps is received; and

replacing the default importance factor for the one recipe step with the received recipe step importance factor as the assigned importance factor for the one recipe step if a recipe step importance factor for one of the plurality of recipe steps is received.

11. The computer-implemented method of claim 10, wherein a recipe step importance factor for one of the plurality of recipe steps is received as a user input via a GUI.

12. A computer system comprising:

a memory to store an importance factor assigned to each of a plurality of sensors and each of a plurality of recipe steps;

a processor coupled to a memory through a bus; and

instructions executed from the memory by the processor to cause the processor to generate an overall importance factor for an association of one of the plurality of sensors with one of the plurality of recipe steps using the importance factor assigned to the one sensor and the importance factor assigned to the one recipe step associated with the one sensor.

13. The computer system of claim 12, wherein:

the memory is further to store an importance factor assigned to each of a plurality of statistics; and

the instructions executed from the memory by the processor to cause the processor further to generate an overall importance factor for an association of the one sensor with the one recipe step with one of the plurality of statistics using the importance factor assigned to the one sensor, the importance factor assigned to the one recipe step, and the importance factor assigned to the one statistic.

14. The computer system of claim 13, wherein the processor is further:

to manage the importance factor for each of the plurality of sensors, each of the plurality of recipe steps, and each of the plurality of statistics.

15. The computer system of claim 12, wherein the processor is further:

to generate a plurality of graphical user interfaces (GUI) for displaying the overall importance factor, the importance factor for each of the plurality of sensors and the importance factor for each of the plurality of recipe steps.

16. The computer system of claim 15, wherein the plurality of GUIs is further for managing the importance factor for each of the plurality of statistics and overall importance factors.

17. The computer system of claim 16, wherein the plurality of GUIs manages the importance factor for each of the plurality of statistics, and overall importance factors in a sensor view.

18. The computer system of claim 16, wherein the plurality of GUIs manages the importance factor for each of the plurality of statistics, and overall importance factors in a recipe step view.

19. A machine-accessible storage medium that provides instructions that, if executed by a machine, will cause the machine to perform operations, comprising:

assigning a sensor importance factor to one of a plurality of sensors, wherein the sensor importance factor indicates an importance of the one sensor relative to the plurality of sensors;

assigning a recipe step importance factor to one of a plurality of recipe steps, the one recipe step being associated with the one sensor, wherein the recipe step importance factor indicates an importance of the one recipe step relative to the plurality of recipe steps;

calculating an overall importance factor using the importance factor assigned to the one sensor and the importance factor assigned to the one recipe step associated with the one sensor; and

providing the overall importance factor for normalizing variables in generating multivariate model results.

20. The machine-accessible storage medium of claim 19, wherein providing the overall importance factor includes displaying the overall importance factor in a GUI.

21. The machine-accessible storage medium of claim 19, further comprising:

assigning a statistic importance factor to one of a plurality of statistics associated with the one sensor and the one recipe step, wherein the statistic importance factor indicates an importance of the one statistic relative to the plurality of statistics for the associated one sensor and the associated one recipe step; and

calculating an overall importance factor using the importance factor assigned to the one sensor, the importance factor assigned to the one recipe step, and the importance factor assigned to the one statistic.