Cryopump
First Claim
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1. A cryopump comprising:
- a refrigerator including a first cooling stage and a second cooling stage cooled to a temperature lower than that of the first cooling stage;
a radiation shield on side surface of which is formed an opening, in which the refrigerator is inserted through the opening such that the first cooling stage is arranged outside and the second cooling stage is arranged inside, and which is thermally connected to the first cooling stage; and
a refrigerator cover thermally connected to the second cooling stage, which extends through the opening from the inside to the outside of the radiation shield, and which is spaced apart from the radiation shield at the opening.
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Abstract
A cryopump includes: a refrigerator having a first cooling stage and a second cooling stage cooled to a temperature lower than that of the first cooling stage; a radiation shield on side surface of which is formed an opening, in which the refrigerator is inserted through the opening such that the first cooling stage is arranged outside and the second cooling stage is arranged inside, and which is thermally connected to the first cooling stage; and a refrigerator cover thermally connected to the second cooling stage, which extends through the opening from the inside to the outside of the radiation shield, and which is spaced apart from the radiation shield at the opening.
13 Citations
8 Claims
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1. A cryopump comprising:
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a refrigerator including a first cooling stage and a second cooling stage cooled to a temperature lower than that of the first cooling stage; a radiation shield on side surface of which is formed an opening, in which the refrigerator is inserted through the opening such that the first cooling stage is arranged outside and the second cooling stage is arranged inside, and which is thermally connected to the first cooling stage; and a refrigerator cover thermally connected to the second cooling stage, which extends through the opening from the inside to the outside of the radiation shield, and which is spaced apart from the radiation shield at the opening. - View Dependent Claims (2, 3, 4, 5, 6)
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7. A cryopump comprising:
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a radiation shield having a tubular side surface on which an opening is formed; a refrigerator including a first cooling stage cooled to a first temperature and thermally connected to the radiation shield;
a second cooling stage cooled to a second temperature lower than the first temperature; and
a connecting member connecting the first cooling stage and the second cooling stage together and having on its surface temperature distribution between the first temperature and the second temperature, the refrigerator inserted through the opening so as to arrange the second cooling stage inside the radiation shield;a refrigerator cover thermally connected to the second cooling stage and extending toward the first cooling stage along the surface of the connecting member; and an interference restraining structure defining a space that houses an ice layer deposited on the refrigerator cover in a way that interference with the radiation shield is avoided, between the radiation shield and an end portion of the refrigerator cover adjacent to the first cooling stage. - View Dependent Claims (8)
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Specification