Acceleration sensor having a surrounding seismic mass
First Claim
Patent Images
1. A micromechanical acceleration sensor, comprising:
- a substrate;
a suspension having at least two anchors on the substrate;
a seismic mass suspended over the substrate with the aid of the suspension, wherein the seismic mass has a mass center of gravity and the seismic mass directly surrounds the suspension, and wherein the at least two anchors of the suspension being situated next to the mass center of gravity of the seismic mass at a distance which is substantially smaller compared to a horizontal extension of the seismic mass; and
multiple stationary capacitive electrodes provided in recesses of the seismic mass.
1 Assignment
0 Petitions
Accused Products
Abstract
A micromechanical acceleration sensor has a substrate, a suspension, a seismic mass, and stationary capacitive electrodes, which seismic mass is suspended over the substrate with the aid of the suspension. The seismic mass has a mass center of gravity, and the suspension has at least two anchors on the substrate, the at least two anchors being situated next to the mass center of gravity at a distance which is small compared to a horizontal extension of the seismic mass. The stationary capacitive electrodes are provided in recesses of the seismic mass. The seismic mass directly surrounds the suspension.
24 Citations
9 Claims
-
1. A micromechanical acceleration sensor, comprising:
-
a substrate; a suspension having at least two anchors on the substrate; a seismic mass suspended over the substrate with the aid of the suspension, wherein the seismic mass has a mass center of gravity and the seismic mass directly surrounds the suspension, and wherein the at least two anchors of the suspension being situated next to the mass center of gravity of the seismic mass at a distance which is substantially smaller compared to a horizontal extension of the seismic mass; and multiple stationary capacitive electrodes provided in recesses of the seismic mass. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9)
-
Specification