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FLEXIBLE PIEZORESISTIVE INTERFACIAL SHEAR AND NORMAL FORCE SENSOR AND SENSOR ARRAY

  • US 20090282930A1
  • Filed: 05/19/2008
  • Published: 11/19/2009
  • Est. Priority Date: 05/19/2008
  • Status: Active Grant
First Claim
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1. A force sensor, comprising:

  • a polymeric substrate with a thickness comprising a cavity with a tilt plane at an angle to a measured interface;

    at least two metal piezoresistors on said tilt plane; and

    a contact pad in electrical contact with said metal piezoresistors;

    wherein said ploymeric substrate and piezoresistors are flexible or deformable, permitting a change in said thickness and in said angle during operation of the force sensor.

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