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LAMINATED WALLS FOR UNIFORM FLUID FLOW

  • US 20090283158A1
  • Filed: 05/16/2008
  • Published: 11/19/2009
  • Est. Priority Date: 05/16/2008
  • Status: Active Grant
First Claim
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1. A chamber including a fluid distribution network for uniform fluid flow within the chamber, comprising:

  • a first chamber wall having a first surface and an opposing interior surface, the first surface formed with a first set of channels, the interior surface exposed to the interior of the chamber and including a plurality of interior ports connected to a plurality of the first set of channels; and

    a second chamber wall having a second surface and an opposing exterior surface, the second surface having a second set of channels, the second set of channels partially intersecting the first set of channels when the first surface is mated with the second surface, the exterior surface including at least one exterior port providing access to the second set of channels.

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