LAMINATED WALLS FOR UNIFORM FLUID FLOW
First Claim
1. A chamber including a fluid distribution network for uniform fluid flow within the chamber, comprising:
- a first chamber wall having a first surface and an opposing interior surface, the first surface formed with a first set of channels, the interior surface exposed to the interior of the chamber and including a plurality of interior ports connected to a plurality of the first set of channels; and
a second chamber wall having a second surface and an opposing exterior surface, the second surface having a second set of channels, the second set of channels partially intersecting the first set of channels when the first surface is mated with the second surface, the exterior surface including at least one exterior port providing access to the second set of channels.
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Accused Products
Abstract
A chamber with a fluid distribution network for uniform fluid flow within the chamber is provided. The chamber includes a first chamber wall that has a first surface and an opposing interior surface. The first surface is formed with a first set of channels, and the interior surface is exposed to the interior of the chamber and includes a plurality of interior ports that are connected to a plurality of the first set of channels. The chamber also includes a second chamber wall that has a second surface and an opposing exterior surface. The second surface has a second set of channels that partially intersect the first set of channels when the first surface is mated with the second surface. The exterior surface also includes at least one exterior port that provides access to the second set of channels.
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Citations
22 Claims
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1. A chamber including a fluid distribution network for uniform fluid flow within the chamber, comprising:
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a first chamber wall having a first surface and an opposing interior surface, the first surface formed with a first set of channels, the interior surface exposed to the interior of the chamber and including a plurality of interior ports connected to a plurality of the first set of channels; and a second chamber wall having a second surface and an opposing exterior surface, the second surface having a second set of channels, the second set of channels partially intersecting the first set of channels when the first surface is mated with the second surface, the exterior surface including at least one exterior port providing access to the second set of channels. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10)
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11. A fluid distribution chamber, comprising:
a base having sidewalls extending therefrom, wherein one of the sidewalls includes a first member and a second member affixed to each other, the first member having an inner surface mating with an outer surface of the second member, the inner surface of the first member having a plurality of cavities defined in a first pattern of spaced apart rows, the outer surface having a plurality of cavities defined in a second pattern of spaced apart columns, wherein a cavity of the first pattern partially intersects with multiple cavities in the second pattern. - View Dependent Claims (12, 13, 14)
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15. A method for distributing a fluid, comprising operations of:
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providing a chamber having first and second walls affixed to each other forming a uniform fluid distribution network; initiating fluid flow through a port, the port connected to the uniform fluid distribution network within the affixed walls; and distributing the fluid flow within the affixed walls, the fluid flow being uniformly distributed between the walls using a first set of channels formed as part of the first wall that partially intersect an opposing second set of channels formed as part of the second wall. - View Dependent Claims (16, 17, 18, 19, 20, 21, 22)
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Specification