LAMINATED WALLS FOR UNIFORM FLUID FLOW

• US 20090283158A1
• Filed: 05/16/2008
• Published: 11/19/2009
• Est. Priority Date: 05/16/2008
• Status: Active Grant

• Current Assignee: Xyratex Corp (Seagate Technology Holdings Plc)
• Original Assignee: Xyratex Corp (Seagate Technology Holdings Plc)
• Inventors: Wallis, Mike, MILLER, KENNETH C.
• Granted Patent: US 8,707,971 B2
• Time in Patent Office: Days
• US Class Current: 137/561.A
• CPC Class Codes: B05D 3/0272 with ovens
• CPC Class Codes: H01L 21/67034 for drying
• CPC Class Codes: H01L 21/6719 characterized by the construction of the processing chambers, e.g. modular processing chambers
• CPC Class Codes: Y10T 137/85938 Non-valved flow dividers

Abstract

A chamber with a fluid distribution network for uniform fluid flow within the chamber is provided. The chamber includes a first chamber wall that has a first surface and an opposing interior surface. The first surface is formed with a first set of channels, and the interior surface is exposed to the interior of the chamber and includes a plurality of interior ports that are connected to a plurality of the first set of channels. The chamber also includes a second chamber wall that has a second surface and an opposing exterior surface. The second surface has a second set of channels that partially intersect the first set of channels when the first surface is mated with the second surface. The exterior surface also includes at least one exterior port that provides access to the second set of channels.

Claims

1. A chamber including a fluid distribution network for uniform fluid flow within the chamber, comprising:

a first chamber wall having a first surface and an opposing interior surface, the first surface formed with a first set of channels, the interior surface exposed to the interior of the chamber and including a plurality of interior ports connected to a plurality of the first set of channels; and

a second chamber wall having a second surface and an opposing exterior surface, the second surface having a second set of channels, the second set of channels partially intersecting the first set of channels when the first surface is mated with the second surface, the exterior surface including at least one exterior port providing access to the second set of channels.

2. The fluid distribution network as described in claim 1, wherein the first set of channels includes a plurality of rows of substantially horizontal channels.

3. The fluid distribution network as described in claim 2, wherein the second set of channels includes a plurality of rows of substantially vertical channels, the vertical channels partially intersecting corresponding horizontal channels.

4. The fluid distribution network as described in claim 1, wherein a cross-sectional area of the plurality of interior ports is substantially the same as a cross-sectional area of the exterior port.

5. The fluid distribution network as described in claim 3, wherein a cross-sectional area of a row of vertical channels and a cross-sectional area of a row of horizontal channels is equivalent.

6. The fluid distribution network as described in claim 1, wherein a first exterior port is configured to introduce fluid to the interior of the chamber through a first plurality of interior ports and a second exterior port is configured to remove fluid from the interior of the chamber through a second plurality of interior ports.

7. The fluid distribution network as described in claim 1, wherein fluid from the exterior port is distributed between the first and second chamber walls through the first and second set of channels and distributed within the interior of the chamber through the interior ports.

8. The fluid distribution network as described in claim 1, wherein fluid is removed from the interior by drawing fluid from the interior of the chamber via the interior ports, between the first and second chamber walls through the first and second set of channels and through the exterior port.

9. The fluid distribution network as described in claim 1, further comprising:

a third chamber wall and a fourth chamber wall configured to mirror the first and second chamber walls across the chamber, the third chamber wall and fourth chamber wall disposed opposite the first and second chamber walls, the third chamber wall having a second plurality of interior ports and channels and the fourth chamber wall having a second plurality of channels and an exterior port.

10. The fluid distribution network as described in claim 9, wherein the second plurality of interior ports is diagonally opposed to the plurality of interior ports.

11. A fluid distribution chamber, comprising:

a base having sidewalls extending therefrom, wherein one of the sidewalls includes a first member and a second member affixed to each other, the first member having an inner surface mating with an outer surface of the second member, the inner surface of the first member having a plurality of cavities defined in a first pattern of spaced apart rows, the outer surface having a plurality of cavities defined in a second pattern of spaced apart columns, wherein a cavity of the first pattern partially intersects with multiple cavities in the second pattern.

12. The fluid distribution chamber as described in claim 11, wherein a sum of cross-sectional areas of the rows and columns is substantially constant across the rows and columns.

13. The fluid distribution chamber as described in claim 11, wherein the cavities of the first pattern of spaced apart rows have an axis of extension that is orthogonal to an axis of extension of the cavities of the second pattern of spaced apart columns.

14. The fluid distribution chamber as described in claim 11 further comprising additional ports, the ports being configured to accommodate accessories.

15. A method for distributing a fluid, comprising operations of:

providing a chamber having first and second walls affixed to each other forming a uniform fluid distribution network;

initiating fluid flow through a port, the port connected to the uniform fluid distribution network within the affixed walls; and

distributing the fluid flow within the affixed walls, the fluid flow being uniformly distributed between the walls using a first set of channels formed as part of the first wall that partially intersect an opposing second set of channels formed as part of the second wall.

16. The method for distributing a fluid as described in claim 15, wherein the first set of channels distributes the fluid flow in a first direction and the second set of channels distributes the fluid flow in second direction, the second direction being substantially orthogonal to the first direction.

17. The method for distributing a fluid as described in claim 15, further comprising:

exposing a processing area to the distributed fluid flow via outlet/inlet ports, the outlet/inlet ports connected to the first and second set of channels; and

exposing a work piece to the distributed fluid flow within the chamber by transporting the work piece into the processing area.

18. The method for distributing a fluid as described in claim 17, wherein the intersection between the first and second set of channels distributes the fluid flow to an increasing number of successive individual channels, the increasing number of successive individual channels reducing in cross-sectional area to maintain an equal total cross-sectional area of inlet/outlet ports.

19. The method for distributing a fluid as described in claim 17, wherein the intersection between the first and second set of channels distributes a vacuum to a decreasing number of successive individual channels, the decreasing number of successive individual channels increasing in cross-sectional area to maintain an equal total cross-sectional area of outlet/inlet ports.

20. The method for distributing a fluid as described in claim 18 further comprising:

flowing a fluid into the inlet port so the fluid is uniformly distributed and dispensed into the chamber through the plurality of outlet ports.

21. The method for removing a fluid as described in claim 18 further comprising:

applying a vacuum to the inlet port so a fluid is uniformly drawn out of the chamber through the plurality of outlet ports.

22. The method for distributing a fluid as described in claim 18, wherein a gravity drain is generated to draw fluid through the plurality of ports to remove fluid from the chamber.