Vacuum Device

• US 20090283290A1
• Filed: 06/28/2006
• Published: 11/19/2009
• Est. Priority Date: 08/12/2005
• Status: Active Grant

• Current Assignee: Hamamatsu Photonics KK
• Original Assignee: Hamamatsu Photonics KK
• Inventors: Kyushima, Hiroyuki, Shimoi, Hideki, Sugiyama, Hiroyuki
• Granted Patent: US 7,906,725 B2
• Time in Patent Office: Days
• US Class Current: 174/50.500
• CPC Class Codes: H01J 43/28 Vessels , e.g. wall of the tube; Windows; Screens; Suppressing undesired discharges or currents
• CPC Class Codes: H01J 5/24 between insulating parts of vessel
• CPC Class Codes: H10K 50/8423 Metallic sealing arrangements
• CPC Class Codes: H10K 50/8426 Peripheral sealing arrangements, e.g. adhesives, sealants

Abstract

An object is to sufficiently keep the airtightness in a vacuum container even when it is made smaller. A photomultiplier tube 1 comprises a flat sheet-like lower substrate 4, a casing-like frame 3b erected on the lower substrate 4, an upper substrate 2 including a frame 3a airtightly joined to an opening part of the frame 3b while holding a low-melting metal therebetween, and a frame-like projection 25b arranged in parallel with the frame 3b on the inner side of the frame 3b on the lower substrate 4.

Claims

1. :

A vacuum device comprising;

a flat sheet-like substrate;

a frame-like side wall erected on the substrate;

a lid member airtightly joined to an opening part of the side wall while holding a low-melting metal therebetween; and

a frame-like projection arranged in parallel with the side wall on the inner side of the side wall on the substrate.

2. :

A vacuum device according to claim 1, wherein the projection is integrally formed with the side wall.

3. :

A vacuum device according to claim 1, wherein at least one of a joint surface of the side wall with the lid member and a joint surface of the lid member with the side wall is formed with a plurality of depressed parts.

4. :

A vacuum device according to claim 3, wherein the plurality of depressed parts are arranged two-dimensionally in a first direction along the joint surface and a second direction orthogonal to the first direction along the joint surface.

5. :

A vacuum device according to claim 1, wherein the projection is provided in a plurality.

6. :

A vacuum device according to claim 5, wherein a projection other than that formed on the innermost side in the plurality of projections is airtightly joined to the lid member while holding the low-melting metal therebetween.

7. :

A vacuum device according to claim 5, wherein the plurality of projections are airtightly joined to the lid member while holding the low-melting metal therebetween, the width of the projection formed on the inner side in a direction along the inner face of the substrate being smaller than the width of the projection formed on the outer side in the direction along the inner face.

8. :

A vacuum device according to claim 1, wherein the projection has a groove part communicating a space surrounded by the projection with a space on the outside of the projection.