Electronic element wafer module and method for manufacturing electronic element wafer module, electronic element module, and electronic information device
First Claim
1. An electronic element wafer module, comprising:
- electronic element wafers, in which a plurality of electronic elements are provided on a front surface side and wiring is provided on a back surface side, the wiring being electrically connected to wiring or a terminal section on the front surface side through a through hole penetrating through both surfaces; and
support substrates adhered by a resin adhesive layer, opposing the front surface side of the electronic element wafer,wherein;
a groove for dicing is formed along a dicing line in between adjacent electronic elements, penetrating the electronic element wafers from the back surface; and
an insulation film for insulating a semiconductor layer from the wiring on the back surface is formed on the back surface of the electronic element wafer including the through hole and is formed at least on a side wall of the groove.
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Accused Products
Abstract
An electronic element wafer module is provided, and the module includes: electronic element wafers, in which a plurality of electronic elements are provided on the front surface side and wiring is provided on the back surface side; and support substrates adhered by a resin adhesive layer, opposing the front surface side of the electronic element wafer, where: a groove for dicing is formed along a dicing line in between adjacent electronic elements, penetrating the electronic element wafers from the back surface; and an insulation film for insulating a semiconductor layer from the wiring on the back surface is formed on the back surface of the electronic element wafer including the through hole and is formed at least on a side wall of the groove.
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Citations
29 Claims
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1. An electronic element wafer module, comprising:
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electronic element wafers, in which a plurality of electronic elements are provided on a front surface side and wiring is provided on a back surface side, the wiring being electrically connected to wiring or a terminal section on the front surface side through a through hole penetrating through both surfaces; and support substrates adhered by a resin adhesive layer, opposing the front surface side of the electronic element wafer, wherein;
a groove for dicing is formed along a dicing line in between adjacent electronic elements, penetrating the electronic element wafers from the back surface; andan insulation film for insulating a semiconductor layer from the wiring on the back surface is formed on the back surface of the electronic element wafer including the through hole and is formed at least on a side wall of the groove. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13, 14, 15, 16, 17, 18, 19, 20, 27, 28, 29)
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21. A method for manufacturing an electronic element wafer module, comprising:
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a step of laminating a support substrate opposing a front surface side of an electronic element wafer by a resin adhesive layer, the electronic element wafer having a plurality of electronic elements formed thereon; a through hole and groove forming step of forming a through hole, which penetrates through both surfaces of the electronic element wafer, for each electronic element and forming a groove for dicing, which penetrates the electronic element wafer from a back surface along a dicing line in between adjacent electronic elements; an insulation film forming step of forming an insulation film on the back surface of the electronic element wafer including the through hole and the groove; and a wiring layer forming step of forming a wiring layer on the insulation film, the wiring layer electrically connecting with wiring or a terminal section on the front surface side of the electronic element wafer through the through hole. - View Dependent Claims (22, 23, 24, 25, 26)
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Specification