MANUFACTURING APPARATUS OF COORDINATE DETECTING DEVICE

• US 20090283507A1
• Filed: 05/11/2009
• Published: 11/19/2009
• Est. Priority Date: 05/15/2008
• Status: Active Grant

• Current Assignee: Fujitsu Component Limited (Fujitsu Limited)
• Original Assignee: Fujitsu Component Limited (Fujitsu Limited)
• Inventors: Kondoh, Koichi
• Granted Patent: US 8,975,556 B2
• Time in Patent Office: Days
• US Class Current: 219/121.680
• CPC Class Codes: G06F 3/045 using resistive elements, e.g. a single continuous surface or two parallel surfaces put in contact
• CPC Class Codes: H01C 17/242 by laser trimming by laser in general B23K26/351

Abstract

A coordinate detecting device includes a resistive film formed on a substrate and a common electrode for applying a voltage to the resistive film, wherein a potential distribution is created in the resistive film, an electric potential of the resistive film at a contact position is detected, and a position of the contact position of the resistive film is detected. In a manufacturing apparatus, a laser light source irradiates laser light to remove a part of the resistive film to form a resistive film removed part, an optical system converges the laser light, a plurality of probes measure electric potentials of a surface of the resistive film with the common electrode providing the voltage to the resistive film, an X-Y table moves the substrate at least two-dimensionally, and a control part controls the X-Y table and the laser light source.

Claims

1. A manufacturing apparatus of a coordinate detecting device, the coordinate detecting device comprising a resistive film formed on a substrate and a common electrode which applies a voltage to the resistive film, wherein an electric potential distribution is created on the resistive film, an electric potential of the resistive film at a position at which a probe comes into contact is detected, and a coordinate of the position on the resistive film is detected, the manufacturing apparatus comprising:

a laser light source which irradiates laser light to remove a part of the resistive film of the coordinate detecting device and form a resistive film removed part;

an optical system which converges the laser light;

a plurality of probes which measure electric potentials of a surface of the resistive film in a state in which a voltage is applied to the resistive film of the coordinate detecting device via the common electrode;

an X-Y table which moves the substrate of the coordinate detecting device at least two-dimensionally; and

a control part which controls the X-Y table and the laser light source.

2. The manufacturing apparatus of a coordinate detecting device, as claimed in claim 1, wherein:

the substrate of the coordinate detecting device is made of an insulative material which transmits the laser light, and

the laser light is irradiated by the laser light source from a surface of the substrate, opposite to a surface on which the resistive film is formed.

3. The manufacturing apparatus of a coordinate detecting device, as claimed in claim 2, wherein:

the plurality of probes are provided on a side opposite to a side on which the laser light source is provided.

4. The manufacturing apparatus of a coordinate detecting device, as claimed in claim 1, wherein:

the resistive film of the coordinate detecting device is made of a material including ITO, or indium oxide, tin oxide or zinc oxide.

5. The manufacturing apparatus of a coordinate detecting device, as claimed in claim 1, wherein:

the substrate and the resistive film of the coordinate detecting device are transparent in a visible region.

6. The manufacturing apparatus of a coordinate detecting device, as claimed in claim 1, wherein:

a wavelength of the laser light falls within a range between 340 and 420 [nm].

7. The manufacturing apparatus of a coordinate detecting device, as claimed in claim 6, wherein:

the laser light source comprises an excimer laser.

8. The manufacturing apparatus of a coordinate detecting device, as claimed in claim 1, wherein:

the plurality of probes include probes for applying a voltage to the common electrode of the coordinate detecting device when electric potentials of the surface of the resistive film of the coordinate detecting device are measured in the state in which the voltage is applied to the resistive film via the common electrode.

9. The manufacturing apparatus of a coordinate detecting device, as claimed in claim 1, wherein:

the control part is configured to control the X-Y table and the laser light source to form the resistive film removed part at a position along the common electrode to control electric potentials provided to the resistive film via the common electrode to make uniform the electric potential distribution created on the resistive film.