Semiconductor device and manufacturing method thereof
First Claim
1. A semiconductor device comprising:
- an n-conductive type semiconductor substrate having a main side and a rear side, and including a trench type MOS transistor cell and a diode cell;
a p-conductive type layer arranged over a main side surface portion of the n-conductive type semiconductor substrate, and having an impurity concentration which decreases from the main side toward the rear side;
a main side n-conductive type region arranged over a surface portion of the p-conductive type layer;
a rear side n-conductive type layer arranged over a rear side surface portion of the n-conductive type semiconductor substrate;
a first trench which reaches the n-conductive type semiconductor substrate and penetrates the main side n-conductive type region and the p-conductive type layer;
a first electrode layer embedded in the first trench through an insulating film, and providing a gate electrode of the trench type MOS transistor cell;
a second electrode layer arranged over the main side of the n-conductive type semiconductor substrate, electrically coupled with the main side n-conductive type region and the p-conductive type layer, and providing both a source electrode of the trench type MOS transistor cell and an anode electrode of the diode cell;
a third electrode layer arranged over the rear side of the n-conductive type semiconductor substrate, electrically coupled with the rear side n-conductive type layer, and providing both a drain electrode of the trench type MOS transistor cell and a cathode electrode of the diode cell; and
a second trench which reaches an inside of the p-conductive type layer,wherein the second electrode layer is embedded in the second trench, and the second electrode layer is electrically coupled with the p-conductive type layer.
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Accused Products
Abstract
A semiconductor device includes an n-conductive type semiconductor substrate having a main side and a rear side, a p-conductive type layer arranged over the main side of the substrate, a main side n-conductive type region arranged in the p-conductive type layer, a rear side n-conductive type layer arranged over the rear side of the substrate, a first trench which reaches the substrate and penetrates the main side n-conductive type region and the p-conductive type layer, a second trench which reaches an inside of the p-conductive type layer, a second electrode layer, which is embedded in the second trench and connected to the p-conductive type layer. Hereby, the semiconductor device, in which the recovery property of a diode cell can be improved without damaging the property of a MOS transistor cell or an IGBT cell and the surge withstand property does not deteriorate, can be obtained.
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Citations
56 Claims
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1. A semiconductor device comprising:
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an n-conductive type semiconductor substrate having a main side and a rear side, and including a trench type MOS transistor cell and a diode cell; a p-conductive type layer arranged over a main side surface portion of the n-conductive type semiconductor substrate, and having an impurity concentration which decreases from the main side toward the rear side; a main side n-conductive type region arranged over a surface portion of the p-conductive type layer; a rear side n-conductive type layer arranged over a rear side surface portion of the n-conductive type semiconductor substrate; a first trench which reaches the n-conductive type semiconductor substrate and penetrates the main side n-conductive type region and the p-conductive type layer; a first electrode layer embedded in the first trench through an insulating film, and providing a gate electrode of the trench type MOS transistor cell; a second electrode layer arranged over the main side of the n-conductive type semiconductor substrate, electrically coupled with the main side n-conductive type region and the p-conductive type layer, and providing both a source electrode of the trench type MOS transistor cell and an anode electrode of the diode cell; a third electrode layer arranged over the rear side of the n-conductive type semiconductor substrate, electrically coupled with the rear side n-conductive type layer, and providing both a drain electrode of the trench type MOS transistor cell and a cathode electrode of the diode cell; and a second trench which reaches an inside of the p-conductive type layer, wherein the second electrode layer is embedded in the second trench, and the second electrode layer is electrically coupled with the p-conductive type layer. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13, 14, 15, 16, 17, 18, 19, 20, 21)
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22. A semiconductor device comprising:
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an n-conductive type semiconductor substrate having a main side and a rear side, and including a planar type MOS transistor cell and a diode cell; a p-conductive type layer arranged over a main side surface portion of the n-conductive type semiconductor substrate, and having an impurity concentration which decreases from the main side toward the rear side; a main side n-conductive type region arranged over a surface portion of the p-conductive type layer; a rear side n-conductive type layer arranged over a rear side surface portion of the n-conductive type semiconductor substrate; an insulating film arranged over a main side surface of the n-conductive type semiconductor substrate, and contacting the main side n-conductive type region, the p-conductive type layer and a portion of the substrate in which the p-conductive type layer is not arranged; a first electrode layer arranged at a surface of the insulating film, and providing a gate electrode of the planar type MOS transistor cell; a second electrode layer arranged over the main side of the n-conductive type semiconductor substrate, electrically coupled with the main side n-conductive type region and the p-conductive type layer, and providing both a source electrode of the planar type MOS transistor cell and an anode electrode of the diode cell; a third electrode layer arranged over the rear side of the n-conductive type semiconductor substrate, electrically coupled with the rear side n-conductive type layer, and providing both a drain electrode of the planar type MOS transistor cell and a cathode electrode of the diode cell; and a trench reaching an inside of the p-conductive type layer, wherein the second electrode layer is embedded in the trench, and the second electrode layer is electrically coupled with the p-conductive type layer.
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23. A semiconductor device comprising:
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a p-conductive type semiconductor substrate having a main side and a rear side, and including a trench type MOS transistor cell and a diode cell; an n-conductive type layer arranged over a main side surface portion of the p-conductive type semiconductor substrate, and having an impurity concentration which decreases from the main side toward the rear side; a main side p-conductive type region arranged over a surface portion of the n-conductive type layer; a rear side p-conductive type layer arranged over a rear side surface portion of the p-conductive type semiconductor substrate; a first trench which reaches the p-conductive type semiconductor substrate and penetrates the main side p-conductive type region and the n-conductive type layer; a first electrode layer embedded in the first trench through an insulating film, and providing a gate electrode of the trench type MOS transistor cell; a second electrode layer arranged over the main side of the p-conductive type semiconductor substrate, electrically coupled with the main side p-conductive type region and the n-conductive type layer, and providing both a source electrode of the trench type MOS transistor cell and an anode electrode of the diode cell; a third electrode layer arranged over the rear side of the p-conductive type semiconductor substrate, electrically coupled with the rear side p-conductive type layer, and providing both a drain electrode of the trench type MOS transistor cell and a cathode electrode of the diode cell; and a second trench which reaches an inside of the n-conductive type layer, wherein the second electrode layer is embedded in the second trench, and the second electrode layer is electrically coupled with the n-conductive type layer. - View Dependent Claims (24, 25, 26, 27, 28, 29, 30, 31, 32, 33, 34, 35, 36, 37, 38, 39, 40, 41)
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42. A semiconductor device comprising:
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a p-conductive type semiconductor substrate having a main side and a rear side, and including a planar type MOS transistor cell and a diode cell; an n-conductive type layer arranged over a main side surface portion of the p-conductive type semiconductor substrate, and having an impurity concentration which decreases from the main side toward the rear side; a main side p-conductive type region arranged over a surface portion of the n-conductive type layer; a rear side p-conductive type layer arranged over a rear side surface portion of the p-conductive type semiconductor substrate; an insulating film arranged over a main side surface of the p-conductive type semiconductor substrate, and contacting the main side p-conductive type region, the n-conductive type layer and a portion of the substrate in which the n-conductive type layer is not arranged; a first electrode layer arranged at a surface of the insulating film, and providing a gate electrode of the planar type MOS transistor cell; a second electrode layer arranged over the main side of the p-conductive type semiconductor substrate, electrically coupled with the main side p-conductive type region and the n-conductive type layer, and providing both a source electrode of the planar type MOS transistor cell and an anode electrode of the diode cell; a third electrode layer arranged over the rear side of the p-conductive type semiconductor substrate, electrically coupled with the rear side p-conductive type layer, and providing both a drain electrode of the planar type MOS transistor cell and a cathode electrode of the diode cell; and a trench reaching an inside of the n-conductive type layer, wherein the second electrode layer is embedded in the trench, and the second electrode layer is electrically coupled with the n-conductive type layer.
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43. A semiconductor device comprising:
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an n-conductive type semiconductor substrate having a main side and a rear side, and including an IGBT cell and a diode cell; a p-conductive type layer arranged over a main side surface portion of the n-conductive type semiconductor substrate, and having an impurity concentration which decreases from the main side toward the rear side; a main side n-conductive type region and a main side p-conductive type region arranged over a surface portion of the p-conductive type layer; a rear side p-conductive type region and a rear side n-conductive type region arranged over a rear side surface portion of the n-conductive type semiconductor substrate; a first trench which reaches the n-conductive type semiconductor substrate and penetrates the main side n-conductive type region and the p-conductive type layer; a first electrode layer embedded in the first trench through an insulating film, and providing a gate electrode of the IGBT cell; a second electrode layer arranged over the main side of the n-conductive type semiconductor substrate, electrically coupled with the main side n-conductive type region and the p-conductive type layer, and providing both an emitter electrode of the IGBT cell and an anode electrode of the diode cell; a third electrode layer arranged over the rear side of the n-conductive type semiconductor substrate, electrically coupled with the rear side p-conductive type region and the rear side n-conductive type region, and providing both a collector electrode of the IGBT cell and a cathode electrode of the diode cell; and a second trench which reaches an inside of the p-conductive type layer and penetrates the main side p-conductive type region, wherein the second electrode layer is embedded in the second trench, and wherein a contact portion of the main side p-conductive type region which contacts the second electrode layer has a p-conductive type impurity concentration higher than a portion of the main side p-conductive type region other than the contact portion so that the second electrode layer is electrically coupled with the main side p-conductive type region by ohmic contact at a sidewall of the second trench. - View Dependent Claims (44, 45, 46, 47)
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48. A semiconductor device comprising:
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an n-conductive type semiconductor substrate having a main side and a rear side, and including an IGBT cell and a diode cell; a p-conductive type layer arranged over a main side surface portion of the n-conductive type semiconductor substrate, and having an impurity concentration which decreases from the main side toward the rear side; a main side n-conductive type region and a main side p-conductive type region arranged over a surface portion of the p-conductive type layer; a rear side p-conductive type region and a rear side n-conductive type region arranged over a rear side surface portion of the n-conductive type semiconductor substrate; a first trench which reaches the n-conductive type semiconductor substrate and penetrates the main side n-conductive type region and the p-conductive type layer; a first electrode layer embedded in the first trench through an insulating film, and providing a gate electrode of the IGBT cell; a second electrode layer arranged over the main side of the n-conductive type semiconductor substrate, electrically coupled with the main side n-conductive type region and the p-conductive type layer, and providing both an emitter electrode of the IGBT cell and an anode electrode of the diode cell; a third electrode layer arranged over the rear side of the n-conductive type semiconductor substrate, electrically coupled with the rear side p-conductive type region and the rear side n-conductive type region, and providing both a collector electrode of the IGBT cell and a cathode electrode of the diode cell; an exposed surface which is exposed at the main side of the n-conductive type semiconductor substrate and an unexposed surface which is not exposed at the main side of the n-conductive type semiconductor substrate in the main side p-conductive type region; and a second trench which reaches an inside of the p-conductive type layer and penetrates the main side p-conductive type region, wherein the second electrode layer is embedded in the second trench and the second electrode layer is electrically coupled with the unexposed surface of the main side p-conductive type region at a sidewall of the second trench, and wherein the second electrode layer is electrically coupled with the exposed surface of the main side p-conductive type region at the main side of the n-conductive type semiconductor substrate. - View Dependent Claims (49)
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50. A semiconductor device comprising:
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a p-conductive type semiconductor substrate having a main side and a rear side, and including an IGBT cell and a diode cell; an n-conductive type layer arranged over a main side surface portion of the p-conductive type semiconductor substrate, and having an impurity concentration which decreases from the main side toward the rear side; a main side p-conductive type region and a main side n-conductive type region arranged over a surface portion of the n-conductive type layer; a rear side n-conductive type region and a rear side p-conductive type region arranged over a rear side surface portion of the p-conductive type semiconductor substrate; a first trench which reaches the p-conductive type semiconductor substrate and penetrates the main side p-conductive type region and the n-conductive type layer; a first electrode layer embedded in the first trench through an insulating film, and providing a gate electrode of the IGBT cell; a second electrode layer arranged over the main side of the p-conductive type semiconductor substrate, electrically coupled with the main side p-conductive type region and the n-conductive type layer, and providing both an emitter electrode of the IGBT cell and an anode electrode of the diode cell; a third electrode layer arranged over the rear side of the p-conductive type semiconductor substrate, electrically coupled with the rear side n-conductive type region and the rear side p-conductive type region, and providing both a collector electrode of the IGBT cell and a cathode electrode of the diode cell; and a second trench which reaches an inside of the n-conductive type layer and penetrates the main side n-conductive type region, wherein the second electrode layer is embedded in the second trench, and wherein a contact portion of the main side n-conductive type region which contacts the second electrode layer has an n-conductive type impurity concentration higher than a portion of the main side n-conductive type region other than the contact portion so that the second electrode layer is electrically coupled with the main side n-conductive type region by ohmic contact at a sidewall of the second trench. - View Dependent Claims (51, 52, 53, 54)
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55. A semiconductor device comprising:
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a p-conductive type semiconductor substrate having a main side and a rear side, and including an IGBT cell and a diode cell; an n-conductive type layer arranged over a main side surface portion of the p-conductive type semiconductor substrate, and having an impurity concentration which decreases from the main side toward the rear side; a main side p-conductive type region and a main side n-conductive type region arranged over a surface portion of the n-conductive type layer; a rear side n-conductive type region and a rear side p-conductive type region arranged over a rear side surface portion of the p-conductive type semiconductor substrate; a first trench which reaches the p-conductive type semiconductor substrate and penetrates the main side p-conductive type region and the n-conductive type layer; a first electrode layer embedded in the first trench through an insulating film, and providing a gate electrode of the IGBT cell; a second electrode layer arranged over the main side of the p-conductive type semiconductor substrate, electrically coupled with the main side p-conductive type region and the n-conductive type layer, and providing both an emitter electrode of the IGBT cell and an anode electrode of the diode cell; a third electrode layer arranged over the rear side of the p-conductive type semiconductor substrate, electrically coupled with the rear side n-conductive type region and the rear side p-conductive type region, and providing both a collector electrode of the IGBT cell and a cathode electrode of the diode cell; an exposed surface which is exposed at the main side of the p-conductive type semiconductor substrate and an unexposed surface which is not exposed at the main side of the p-conductive type semiconductor substrate in the main side n-conductive type region; and a second trench which reaches an inside of the n-conductive type layer and penetrates the main side n-conductive type region, wherein the second electrode layer is embedded in the second trench and the second electrode layer is electrically coupled with the unexposed surface of the main side n-conductive type region at a sidewall of the second trench, and wherein the second electrode layer is electrically coupled with the exposed surface of the main side n-conductive type region at the main side of the p-conductive type semiconductor substrate. - View Dependent Claims (56)
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Specification