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BACKSIDE CONTROLLED MEMS CAPACITIVE SENSOR AND INTERFACE AND METHOD

  • US 20090283846A1
  • Filed: 05/15/2008
  • Published: 11/19/2009
  • Est. Priority Date: 05/15/2008
  • Status: Active Grant
First Claim
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1. A capacitive sensor element assembly, comprising:

  • a first semiconductive layer,a first conductive layer, anda first dielectric layer into which a cavity has been formed, the first dielectric layer lying between the first semiconductive layer and the first conductive layer,wherein an electrical connection is made to the second conductive layer.

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