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RETICLE DEFECT INSPECTION APPARATUS AND RETICLE DEFECT INSPECTION METHOD

  • US 20090284591A1
  • Filed: 04/29/2009
  • Published: 11/19/2009
  • Est. Priority Date: 05/16/2008
  • Status: Active Grant
First Claim
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1. A reticle defect inspection method in which an image sensor (11) is moved relative to a reticle (1), and an optical image obtained by amplifying an output of each pixel of the image sensor by a sensor amplifier (15) is compared with a reference image defined as a standard image relative to the optical image to perform a defect inspection of the reticle,the sensor amplifier (15) being capable of calibrating a gain and an offset of a signal amplitude every pixel, the reticle defect inspection method comprising, before the defect inspection:

  • imaging some of patterns of the reticle (1) by the image senor (11), and storing bottom and peak values of an amount-of-light signal of each pixel amplified by the sensor amplifier (15);

    setting a plurality of offsets in the sensor amplifier by setting each offset of a signal amplitude for each pixel of the sensor amplifier (15), based on stored bottom value of each pixel; and

    setting a plurality of gains in the sensor amplifier by setting each gain of a signal amplitude for each pixel of the sensor amplifier (15), based on the offset of the signal amplitude of each pixel and on stored peak value of each pixel.

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