EXPOSURE APPARATUS, EXPOSURE METHOD, AND DEVICE MANUFACTURING METHOD
First Claim
1. An exposure apparatus, the apparatus comprising:
- a movable body which holds the object and substantially moves along a predetermined plane;
a liquid supply device which supplies liquid on a surface of the movable body on which the object is mounted including a surface of the object;
a pattern generation device including an optical system which has liquid supplied to a space formed with the surface of the movable body, irradiates an energy beam on the object via the optical system and the liquid, and forms a pattern on the object;
a measurement system which includes an encoder system having a plurality of encoder heads placed on the surface of the movable body that measures positional information of the movable body, based on an output of a predetermined number of encoder heads facing a grating section placed parallel to the predetermined plane external to the movable body out of the plurality of encoder heads; and
a detection device which is connected to the measurement system, and for at least one of the plurality of encoder heads, detects residual information of the liquid on a photodetection section and outputs the detection results to the measurement system.
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Accused Products
Abstract
In an exposure apparatus of a liquid immersion exposure method, there is a case when a wafer table holding a wafer moves, a liquid immersion area formed by liquid supplied in a space between a wafer table and a projection optical system passes over a head mounted on the wafer table. Therefore, for a head over which the liquid immersion area has passed, the residual presence of the liquid is detected based on an amount of light of a reflected light received by the light receiving element which receives the reflected light from the wafer table surface. And, of a plurality of heads, positional information of the wafer table is measured, based on measurement values of a head that had no liquid remaining in the detection.
94 Citations
24 Claims
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1. An exposure apparatus, the apparatus comprising:
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a movable body which holds the object and substantially moves along a predetermined plane; a liquid supply device which supplies liquid on a surface of the movable body on which the object is mounted including a surface of the object; a pattern generation device including an optical system which has liquid supplied to a space formed with the surface of the movable body, irradiates an energy beam on the object via the optical system and the liquid, and forms a pattern on the object; a measurement system which includes an encoder system having a plurality of encoder heads placed on the surface of the movable body that measures positional information of the movable body, based on an output of a predetermined number of encoder heads facing a grating section placed parallel to the predetermined plane external to the movable body out of the plurality of encoder heads; and a detection device which is connected to the measurement system, and for at least one of the plurality of encoder heads, detects residual information of the liquid on a photodetection section and outputs the detection results to the measurement system. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13, 14, 15, 16, 17, 18)
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19. An exposure method in which an energy beam is irradiated on an object via an optical system and liquid, and a pattern is formed on the object, the method comprising:
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a measurement process in which of a plurality of encoder heads placed on a surface of a movable body where the object is mounted that substantially moves along a predetermined plane, positional information of the movable body is measured, based on an output of a predetermined number of encoder heads facing a grating section placed parallel to the predetermined plane external to the movable body; and a detection process in which residual information of the liquid on the photodetection section is detected for at least one of the plurality of encoder heads. - View Dependent Claims (20, 21, 22, 23, 24)
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Specification