SILICA-ON-SILICON WAVEGUIDES AND RELATED FABRICATION METHODS
First Claim
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1. A silica waveguide, comprising:
- a first silica waveguide structure;
a second silica waveguide structure;
a silica separation strip separating the first silica waveguide structure from the second silica waveguide structure; and
a silicon pillar supporting the first silica waveguide structure, the second silica waveguide structure, and the silica separation strip.
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Abstract
True time delay silica waveguides and related fabrication methods are disclosed. Also disclosed are true time delay silica waveguides comprising wedged silica structures.
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Citations
28 Claims
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1. A silica waveguide, comprising:
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a first silica waveguide structure; a second silica waveguide structure; a silica separation strip separating the first silica waveguide structure from the second silica waveguide structure; and a silicon pillar supporting the first silica waveguide structure, the second silica waveguide structure, and the silica separation strip. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10)
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11. A method for fabricating a silica waveguide, comprising:
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defining a substantially polygonal silica pad on a silicon substrate; performing a laser silica reflow process on the silica pad; and
, after that,cleaving at least one of the sides of the silica pad to define two non-resonant waveguide structures. - View Dependent Claims (12, 13, 14, 15, 16, 17, 18, 19)
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20. A silica waveguide having a substantially curved shape, comprising:
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a first curved waveguide; a second curved waveguide; and a transition section connecting the first curved waveguide with the second curved waveguide, wherein the first curved waveguide, second curved waveguide, and transition section are wedged silica structures forming a non-resonant silica waveguide. - View Dependent Claims (21, 22, 23, 24, 25, 26, 27, 28)
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Specification