SOFTWARE APPLICATION TO ANALYZE EVENT LOG AND CHART TOOL FAIL RATE AS FUNCTION OF CHAMBER AND RECIPE
First Claim
1. A computer-implemented method, comprising:
- providing a user interface to illustrate a plurality of fault-related events for a plurality of recipes performed on a plurality of manufacturing process hardware tools, wherein each of the plurality of fault-related events corresponds to one of the plurality of recipes being performed on one of the plurality of manufacturing process hardware tools;
presenting in the user interface the plurality of recipes in a first axis and the plurality of manufacturing process hardware tools in a second axis; and
graphically indicating in the user interface whether the plurality of fault-related events were caused by one of the plurality of manufacturing process hardware tools or one of the plurality of recipes performed on the one manufacturing process hardware tools.
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Accused Products
Abstract
In one embodiment, a method for providing a user interface to graphically indicate a cause for fault-related events includes providing a user interface to illustrate a plurality of fault-related events for a plurality of recipes performed on a plurality of manufacturing process hardware tools, presenting in the user interface the plurality of recipes in a first axis and the plurality of manufacturing process hardware tools in a second axis, and graphically indicating in the user interface whether the plurality of fault-related events were caused by one of the plurality of manufacturing process hardware tools or one of the plurality of recipes performed on the one manufacturing process hardware tools.
71 Citations
24 Claims
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1. A computer-implemented method, comprising:
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providing a user interface to illustrate a plurality of fault-related events for a plurality of recipes performed on a plurality of manufacturing process hardware tools, wherein each of the plurality of fault-related events corresponds to one of the plurality of recipes being performed on one of the plurality of manufacturing process hardware tools; presenting in the user interface the plurality of recipes in a first axis and the plurality of manufacturing process hardware tools in a second axis; and graphically indicating in the user interface whether the plurality of fault-related events were caused by one of the plurality of manufacturing process hardware tools or one of the plurality of recipes performed on the one manufacturing process hardware tools. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12)
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13. A machine-accessible storage medium that provides instructions that, if executed by a machine, will cause the machine to perform operations, comprising:
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providing a user interface to illustrate a plurality of fault-related events for a plurality of recipes performed on a plurality of manufacturing process hardware tools, wherein each of the plurality of fault-related events corresponds to one of the plurality of recipes being performed on one of the plurality of manufacturing process hardware tools; presenting in the user interface the plurality of recipes in a first axis and the plurality of manufacturing process hardware tools in a second axis; and graphically indicating in the user interface whether the plurality of fault-related events were caused by one of the plurality of manufacturing process hardware tools or one of the plurality of recipes performed on the one manufacturing process hardware tools. - View Dependent Claims (14, 15, 16, 17, 18)
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19. A system comprising:
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a database to store event data for a plurality of recipes performed on a plurality of manufacturing process hardware tools, and to store fault-related calculations for the plurality of recipes performed on the plurality of manufacturing process hardware tools; and a graphical user interface (GUI) module, coupled to the database, to provide a user interface to illustrate a plurality of fault-related events for the plurality of recipes performed on the plurality of manufacturing process hardware tools, wherein each of the plurality of fault-related events corresponds to one of the plurality of recipes being performed on one of the plurality of manufacturing process hardware tools; present in the user interface the plurality of recipes in a first axis and the plurality of manufacturing process hardware tools in a second axis; and graphically indicate in the user interface whether the plurality of fault-related events were caused by one of the plurality of manufacturing process hardware tools or one of the plurality of recipes performed on the one manufacturing process hardware tools. - View Dependent Claims (20, 21, 22, 23, 24)
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Specification