METHOD AND APPARATUS FOR USING A DATABASE TO QUICKLY IDENTIFY AND CORRECT A MANUFACTURING PROBLEM AREA IN A LAYOUT
First Claim
1. A computer-implemented method to identify a manufacturing problem area in a layout, the method comprising:
- performing, by computer, a model-based simulation for a first sample in the layout to obtain a first simulation-result which indicates whether a feature associated with the first sample in the layout is expected to have manufacturing problems;
associating, in a database, the first sample with the first simulation-result; and
in response to determining that a rotated version of a second sample in the layout is substantially similar to the first sample in the layout, using the first simulation-result to determine whether a feature associated with the second sample in the layout is expected to have manufacturing problems.
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Abstract
One embodiment provides a system for using a database to quickly identify a manufacturing problem area in a layout. During operation, the system receives a first check-figure which identifies a first area in a first layout, wherein the first area is associated with a first feature. Next, the system determines a first sample using the first check-figure, wherein the first sample represents the first layout'"'"'s geometry within a first ambit of the first check-figure, wherein the first sample'"'"'s geometry is expected to affect the shape of the first feature. The system then performs a model-based simulation using the first sample to obtain a first simulation-result which indicates whether the first feature is expected to have manufacturing problems. Next, the system stores the first simulation-result in a database which is used to quickly determine whether a second feature is expected to have manufacturing problems.
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Citations
20 Claims
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1. A computer-implemented method to identify a manufacturing problem area in a layout, the method comprising:
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performing, by computer, a model-based simulation for a first sample in the layout to obtain a first simulation-result which indicates whether a feature associated with the first sample in the layout is expected to have manufacturing problems; associating, in a database, the first sample with the first simulation-result; and in response to determining that a rotated version of a second sample in the layout is substantially similar to the first sample in the layout, using the first simulation-result to determine whether a feature associated with the second sample in the layout is expected to have manufacturing problems. - View Dependent Claims (2, 3, 4, 5)
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6. A computer-implemented method to perform proximity correction on a layout, the method comprising:
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determining, by computer, a first proximity-correction which when applied to a first sample corrects a manufacturing problem in a feature associated with the first sample; associating, in a database, the first sample with the first proximity-correction in a database; and in response to determining that a rotated version of a second sample in the layout is substantially similar to the first sample in the layout, applying the first proximity-correction to the second sample to correct a manufacturing problem in a feature associated with the second sample. - View Dependent Claims (7, 8, 9)
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10. A computer-readable storage device storing instructions that when executed by a computer cause the computer to perform a method for proximity correction on a layout, the method comprising:
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determining a first proximity-correction which when applied to a first sample corrects a manufacturing problem in a feature associated with the first sample; associating the first sample with the first proximity-correction in a database; and in response to determining that a rotated version of a second sample in the layout is substantially similar to the first sample in the layout, applying the first proximity-correction to the second sample to correct a manufacturing problem in a feature associated with the second sample. - View Dependent Claims (11, 12, 13)
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14. A computer-readable storage device storing instructions that when executed by a computer cause the computer to perform a method to identify a manufacturing problem area in a layout, the method comprising:
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performing a model-based simulation for a first sample in the layout to obtain a first simulation-result which indicates whether a feature associated with the first sample in the layout is expected to have manufacturing problems; determining a first hash value based at least on coordinates associated with one or more polygons in the first sample; associating the first hash value with the first simulation-result; determining a second hash value based at least on coordinates associated with one or more polygons in a second sample; and in response to determining that the second hash value is equal to the first hash value, using the first simulation-result to determine whether a feature associated with the second sample in the layout is expected to have manufacturing problems. - View Dependent Claims (15, 16)
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17. A system for performing proximity correction on a layout, the system comprising:
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a database which associates a first hash value with a first proximity correction which corrects a manufacturing problem in a feature associated with a first sample in the layout; a processor; and a memory storing instructions executable by the processor, the instructions comprising; instructions for determining a second hash value based at least on coordinates of one or more polygons in a second sample; instructions for querying the database using the second hash value to obtain the first proximity correction, wherein the database returns the first proximity correction if the second hash value is equal to the first hash value; and instructions for applying the first proximity correction to the second sample to correct a manufacturing problem in a feature associated with the second sample. - View Dependent Claims (18, 19, 20)
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Specification