Semiconductor Device and Fabrication Method Thereof
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Abstract
A p channel TFT of a driving circuit has a single drain structure and its n channel TFT, an LDD structure. A pixel TFT has the LDD structure. A pixel electrode disposed in a pixel unit is connected to the pixel TFT through a hole bored in at least a protective insulation film formed of an inorganic insulating material and formed above a gate electrode of the pixel TFT, and in an inter-layer insulation film disposed on the insulation film in close contact therewith. These process steps use 6 to 8 photo-masks.
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Citations
80 Claims
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1-6. -6. (canceled)
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7. A semiconductor device having, on the same substrate, pixel TFTs disposed in a pixel unit and a driving circuit including p channel type TFTs and n channel type TFTs and disposed round said pixel unit, wherein:
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said p channel type TFT of said driving circuit has a channel formation region and a p type impurity region having a third concentration, for forming a source region or a drain region; said n channel type TFT of said driving circuit and said pixel TFT each have a channel formation region, an n type impurity region having a first concentration, disposed in contact with said channel formation region and forming an LDD region, and an n type impurity region for forming a source region or a drain region, having a second concentration and disposed outside said n type impurity region having the first concentration; and each pixel electrode disposed in said pixel unit has a light transmitting surface and is formed on an inter-layer insulation film made of an organic insulating material, and is connected to an electrically conductive lead wire connected to said pixel TFT, through a hole bored in at least a protective insulation film made of an inorganic insulating material and disposed above a gate electrode of said pixel TFT and said inter-layer insulation film formed on said protective insulation film in close contact therewith. - View Dependent Claims (8, 9, 10, 11, 12)
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13-20. -20. (canceled)
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21. A semiconductor device having a liquid crystal sandwiched between a pair of substrates, wherein:
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in one of said substrates having pixel TFTs of a pixel unit and p channel type TFTs and n channel type TFTs of a driving circuit; said p channel type TFT of said driving circuit has a channel formation region and a p type impurity region having a third concentration, for forming a source region or a drain region; said n channel type TFT of said driving circuit and said pixel TFT each have a channel formation region, an n type impurity region having a first concentration, disposed in contact with said channel formation region and forming an LDD region, and an n type impurity region for forming a source region or a drain region, having a second concentration and disposed outside said n type impurity region having the first concentration; each pixel electrode disposed in said pixel unit has a light transmitting property and is formed on an inter-layer insulation film made of an organic insulating material and is connected to a conductive metal lead wire connected to said pixel TFT through a hole bored in at least a protective insulation film made of an inorganic insulating material and disposed above a gate electrode of said pixel TFT and said inter-layer insulation film formed on said protective insulation film in close contact therewith; and said one substrate is bonded to the other of said substrates having a transparent conductor formed thereon through at least one columnar spacer formed in superposition with said hole. - View Dependent Claims (22, 23, 24, 25, 26, 27)
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29-33. -33. (canceled)
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34. A method of fabricating a semiconductor device having, on the same substrate, a pixel TFT disposed in a pixel unit and a driving circuit including a p channel type TFT and an n channel type TFT and disposed round said pixel unit, comprising the steps of:
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forming an underlying film over said substrate; forming a plurality of island-like semiconductor layers over said underlying film; forming n type impurity regions having a first concentration, for forming LDD regions of said n channel type TFT of said driving circuit and said pixel TFT in a selected region of said island-like semiconductor layer; forming high concentration n type impurity regions for forming source regions or drain regions outside said n type impurity regions having the first concentration; forming a p type impurity region having a third concentration, for forming a source region or a drain region of said p channel type TFT of said driving circuit in a selected region of said island-like semiconductor layers; forming a protective insulation film formed of an inorganic insulating material above gate electrodes of said n channel type TFT of said driving circuit, said pixel TFT and said p channel type TFT; forming an inter-layer insulation film formed of an organic insulating material in close contact with said protective insulation film; forming a conductive metal lead wire to be connected to said pixel TFT; and forming a pixel electrode comprising a transparent conductor film to be connected to said conductive metal lead wire, on said inter-layer insulation film. - View Dependent Claims (35, 36, 37, 38)
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39. A method of fabricating a semiconductor device having a liquid crystal sandwiched between a pair of substrates, comprising, the following steps for one of substrates including a pixel TFT disposed in a pixel unit and a driving circuit having a p channel type TFT and an n channel type TFT round said pixel unit:
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forming an underlying film over said one of substrates; forming a plurality of island-like semiconductor layers over said underlying film; forming n type impurity regions having a first concentration, for forming LDD regions of said n channel type TFT of said driving circuit and said pixel TFT, in a selected region of said island-like semiconductor layers; forming n type impurity regions having a second concentration, for forming source regions or drain regions outside said n type impurity regions having the first concentration; forming a p type impurity region having a third concentration, for forming a source region or a drain region of said p channel type TFT of said driving circuit, in a selected region of said island-like semiconductor layers; forming a protective insulation film formed of an inorganic insulating material above the gate electrodes of said n channel type TFT of said driving circuit, said pixel TFT and said p channel type TFT; forming an inter-layer insulating film formed of an organic insulating material in close contact with said protective insulation film; and forming on said inter-layer insulation film a pixel electrode having a light reflecting surface and to be connected to said pixel TFT through a hole bored in said inter-layer insulation film and in said protective insulation film; and comprising, as for the other of said substrates, the step of forming at least a transparent conductor film; said method further comprising the step of bonding said one of substrates to the other of said substrates through at least one columnar spacer formed in superposition with said hole. - View Dependent Claims (40, 41, 42, 43, 44, 45)
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46. A method of fabricating a semiconductor device having a liquid crystal sandwiched between a pair of substrates, comprising the following steps for one of substrates having a pixel TFT disposed in a pixel unit and a driving circuit having a p channel type TFT and an n channel type TFT and disposed round said pixel unit;
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forming an underlying film over said one of substrates; forming a plurality of island-like semiconductor layers over said underlying film; forming n type impurity regions having a first concentration, for forming LDD regions of said n channel type TFT and said pixel TFT, in a selected region of said island-like semiconductor layers; forming n type impurity region having a second concentration, for forming source regions or drain regions outside said n type impurity regions having the first concentration; forming a p type impurity region having a third concentration, for forming a source region or a drain region of said p channel type TFT of said driving circuit, in a selected region of said island-like semiconductor layers; forming a protective insulation film formed of an inorganic insulating material above gate electrodes of said n channel type TFT of said driving circuit, said pixel TFT and said p channel type TFT; forming an inter-layer insulation film formed of an organic insulating material in close contact with said protective insulation film; forming a conductive metal lead wire connected to said pixel TFT, through a hole bored in said inter-layer insulation film and said protective insulation film; and forming a pixel electrode comprising a transparent conductor film to be connected to said metal lead wire, on said inter-layer insulation film; and comprising, as for the other of said substrates, the step of forming at least a transparent conductor film on the other of said substrates; said method further comprising the step of bonding said one of substrates to the other of said substrates through at least one columnar spacer formed in superposition with said hole. - View Dependent Claims (47, 48, 49, 50, 51, 52)
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53. A method of fabricating a semiconductor device having, on the same substrate, a pixel TFT disposed in a pixel unit and a driving circuit including an n channel type TFT and disposed round said pixel unit, said method comprising:
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forming at least two island-like semiconductor layers over said substrate; forming a gate electrode over each of said at least two island-like semiconductor layers; introducing a first n type impurity into each of said at least two island-like semiconductor layers at a first concentration by using said gate electrode as a mask; introducing a second n type impurity into each of said at least two island-like semiconductor layers at a second concentration by using said gate electrode as a mask and by using a resist as a mask to form an LDD region having said first concentration in said pixel TFT and said n channel type TFT and to form a source region and a drain region having said second concentration in said pixel TFT and said n channel type TFT; forming a protective insulation film formed of an inorganic insulating material over said gate electrode; activating said first n type impurity and said second n type impurity after the formation of said protective insulating film; and forming an inter-layer insulation film formed of an organic insulating material over said protective insulation film after the activation. - View Dependent Claims (54, 55, 56, 57, 58, 59, 60, 61, 62)
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63. A semiconductor device comprising:
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a substrate; a semiconductor layer provided over said substrate; a source region and a drain region provided in said semiconductor layer; a channel region provided between said source region and said drain region and provided in said semiconductor layer; an LDD region provided between said channel region and one of said source region and said drain region; a gate electrode provided adjacent to said channel region with a gate insulating film therebetween, a side of said gate electrode aligned with a side of said LDD region; a first insulating film provided over said gate electrode and said gate insulating film and comprising silicon oxide nitride; and a second insulating film provided over said first insulating film and comprising an organic resin to provide a leveled surface over said gate electrode. - View Dependent Claims (64, 65, 66)
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67. A semiconductor device comprising:
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a substrate; a semiconductor layer provided over said substrate; a source region and a drain region provided in said semiconductor layer; a channel region provided between said source region and said drain region and provided in said semiconductor layer; an LDD region provided between said channel region and one of said source region and said drain region; a gate electrode provided adjacent to said channel region with a gate insulating film therebetween, said gate electrode comprising a first conductive layer and a second conductive layer provided over said first conductive layer, a side of said gate electrode aligned with a side of said LDD region; a first insulating film provided over said gate electrode and said gate insulating film and comprising silicon oxide nitride; and a second insulating film provided over said first insulating film and comprising an organic resin to provide a leveled surface over said gate electrode. - View Dependent Claims (68, 69, 70)
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71. A semiconductor device comprising:
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a substrate; a semiconductor layer provided over said substrate; a source region and a drain region provided in said semiconductor layer; a channel region provided between said source region and said drain region and provided in said semiconductor layer; an LDD region provided between said channel region and one of said source region and said drain region; a gate electrode provided adjacent to said channel region with a gate insulating film therebetween, said gate electrode comprising a first conductive layer and a second conductive layer provided over said first conductive layer, a side of said gate electrode aligned with a side of said LDD region; a first insulating film provided over said gate electrode and said gate insulating film and comprising silicon oxide nitride; and a second insulating film provided over said first insulating film and comprising an organic resin to provide a leveled surface over said gate electrode, wherein said first conductive layer comprises a material selected from the group consisting of tantalum nitride, tungsten nitride, titanium nitride, molybdenum nitride, tungsten silicide, titanium silicide, and molybdenum silicide, and wherein said second conductive layer comprises a material selected from the group consisting of tantalum, titanium, molybdenum, tungsten, Mo—
W alloy, and Mo—
Ta alloy. - View Dependent Claims (72, 73, 74)
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75. A semiconductor device comprising:
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a substrate; a semiconductor layer provided over said substrate; a source region and a drain region provided in said semiconductor layer; a channel region provided between said source region and said drain region and provided in said semiconductor layer; an offset region provided between said channel region and one of said source region and said drain region; a gate electrode provided adjacent to said channel region with a gate insulating film therebetween; and a first insulating film provided over said gate electrode and said gate insulating film and covering a side surface of said gate electrode over said offset region and comprising an inorganic insulating material. - View Dependent Claims (76, 77)
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78. A semiconductor device comprising:
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a substrate; a semiconductor layer provided over said substrate; a source region and a drain region provided in said semiconductor layer; a channel region provided between said source region and said drain region and provided in said semiconductor layer; a gate electrode provided adjacent to said channel region with a gate insulating film therebetween, said gate electrode comprising a material selected from the group consisting of tungsten and tantalum; and a conductor layer comprising a nitride of said material of said gate electrode and covering an upper surface and a side surface of said gate electrode. - View Dependent Claims (79, 80)
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Specification