Additives to Prevent Degradation of Cyclic Alkene Derivatives
First Claim
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1. A composition, comprising:
- (a) one or more substituted or unsubstituted cyclic alkenes, and(b) an antioxidant composition comprising at least one compound of Formula (I),
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Abstract
This disclosure relates to compositions that includes (a) one or more substituted or unsubstituted cyclic alkenes, and (b) an antioxidant composition including at least one compound of Formula (I):
R1 through R4 in Formula (I) are described in the specification.
61 Citations
48 Claims
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1. A composition, comprising:
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(a) one or more substituted or unsubstituted cyclic alkenes, and (b) an antioxidant composition comprising at least one compound of Formula (I), - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13, 14, 15)
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16. A process, comprising treating a substrate in a film deposition chamber with at least one cyclic alkene composition and at least one silicon containing compound to form a carbon doped silicon oxide film on the substrate,
wherein the cyclic alkene composition comprises: -
(a) one or more substituted or unsubstituted cyclic alkenes, and (b) an antioxidant composition comprising at least one compound of Formula (I), - View Dependent Claims (17, 18, 19, 20, 21, 22, 23, 24, 25, 26, 27, 28, 29, 30, 31, 32, 33)
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34. A composition, comprising:
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(a) a cyclic alkene selected from the group consisting of dipentene, phellandrene, dicyclopentadiene, alpha-terpinene, gamma-terpinene, limonene, alpha-pinene, 3-carene, terpinolene, norbornene, norbornadiene, 5-vinyl-2-norbornene, and 5-ethylidene-2-norbornene, and (b) an antioxidant composition comprising 4-methyl-1,2-dihydroxybenzene or 3-methoxy-1,2-dihydroxybenzene, wherein the antioxidant composition is present in a concentration between about 50 ppm and about 150 ppm. - View Dependent Claims (35, 36)
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37. A process, comprising treating a substrate in a film deposition chamber with at least one cyclic alkene composition and at least one silicon containing compound to form a carbon doped silicon oxide film on the substrate,
wherein the cyclic alkene composition comprises: -
(a) a cyclic alkene selected from the group consisting of dipentene, phellandrene, dicyclopentadiene, alpha-terpinene, gamma-terpinene, limonene, alpha-pinene, 3-carene, terpinolene, norbornene, norbornadiene, 5-vinyl-2-norbornene, and 5-ethylidene-2-norbornene, and (b) an antioxidant composition comprising 4-methyl-1,2-dihydroxybenzene or 3-methoxy-1,2-dihydroxybenzene, wherein the antioxidant composition is present in a concentration between about 50 ppm and about 150 ppm.
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38. An apparatus, comprising:
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a sealed container comprising a cyclic alkene composition, the cyclic alkene composition comprising (a) at least one substituted or unsubstituted cyclic alkene, and (b) at least one antioxidant composition, wherein the cyclic alkene composition generates at most about 200 ppm of residue after one year of storage in the sealed container at room temperature. - View Dependent Claims (39)
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40. An apparatus, comprising:
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a sealed container comprising from about 0 ppm to about 150 ppm oxygen and a cyclic alkene composition, the composition comprising (a) at least one substituted or unsubstituted cyclic alkene, and (b) at least one antioxidant composition, wherein the cyclic alkene composition generates at most about 20 ppm of residue after being heated at 80°
C. for 12 hours in the sealed container. - View Dependent Claims (41, 42, 43)
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44. A process, comprising:
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storing a cyclic alkene composition in a sealed container for at least 6 months, and after storing the cyclic alkene composition, using the cyclic alkene composition together with at least one silicon-containing compound in a chemical vapor deposition process to form a carbon doped silicon oxide film on a substrate, wherein the cyclic alkene composition comprises; (a) one or more substituted or unsubstituted cyclic alkenes, and (b) an antioxidant composition comprising at least one compound of Formula (I),
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45. A process for stabilizing a cyclic alkene, comprising:
adding at least one compound of Formula (I) to the cyclic alkene, - View Dependent Claims (46, 47, 48)
Specification