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CAPACITIVE SENSOR WITH STRESS RELIEF THAT COMPENSATES FOR PACKAGE STRESS

  • US 20090293616A1
  • Filed: 05/29/2008
  • Published: 12/03/2009
  • Est. Priority Date: 05/29/2008
  • Status: Active Grant
First Claim
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1. A device comprising:

  • a microelectromechanical systems (MEMS) sensor, said sensor comprising;

    a movable element adapted for motion relative to a rotational axis offset between first and second ends thereof to form a first section between said rotational axis and said first end and a second section between said rotational axis and said second end, said first section exhibiting a first length between said rotational axis and said first end that is greater than a second length between said rotational axis and said second end, said first section including slots extending through said movable element; and

    a static conductive layer spaced away from said moveable element, said static conductive layer including a first electrode element and a second electrode element, said first electrode element facing said first section and said second electrode element facing said second section of said movable element.

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