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STAGE UNIT FOR SUPPORTING A SUBSTRATE AND APPARATUS FOR PROCESSING A SUBSTRATE INCLUDING THE SAME

  • US 20090293809A1
  • Filed: 05/28/2009
  • Published: 12/03/2009
  • Est. Priority Date: 05/28/2008
  • Status: Abandoned Application
First Claim
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1. A stage for supporting a substrate, comprising:

  • a body on which the substrate is positioned, the body including a plate having an electrode member therein and a tube protruded from a bottom surface of the plate and through which wirings are extended from the electrode member; and

    a first insulation section inserted into the tube and having a plurality of first holes through which the wirings are inserted, respectively.

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