STAGE UNIT FOR SUPPORTING A SUBSTRATE AND APPARATUS FOR PROCESSING A SUBSTRATE INCLUDING THE SAME

• US 20090293809A1
• Filed: 05/28/2009
• Published: 12/03/2009
• Est. Priority Date: 05/28/2008
• Status: Abandoned Application

• Current Assignee: KoMiCo Ltd.
• Original Assignee: KoMiCo Ltd.
• Inventors: Park, Myoung-Ha, Jung, Byung-Jin, Cho, Sang-Bum
• Application Number:
  US12/473,316
• Publication Number:
  US 20090293809A1
• Time in Patent Office: Days
• US Class Current: 118/725
• CPC Class Codes: C23C 16/4583 the substrate being supported substantially horizontally
• CPC Class Codes: H01L 21/68757 characterised by a coating or a hardness or a material
• CPC Class Codes: H01L 21/68785 characterised by the mechanical construction of the susceptor, stage or support
• CPC Class Codes: H01L 21/68792 characterised by the construction of the shaft

Abstract

In a stage for supporting a substrate, a body, a base plate and a buffer are provided in the stage. The body on which the substrate is positioned includes a plate having a heating electrode for generating heat therein and a tube protruded from a bottom surface of the plate. The body is mounted on the base plate. The buffer is interposed between the base plate and the tube and has a thermal expansion ratio higher than that of the tube of the body and lower than that of the base plate. Accordingly, thermal expansion of the base plate may be absorbed by the buffer and may not have direct effect on the body. Therefore, the body may be prevented from being damaged due to the thermal expansion of the base plate.

Claims

1. A stage for supporting a substrate, comprising:

a body on which the substrate is positioned, the body including a plate having an electrode member therein and a tube protruded from a bottom surface of the plate and through which wirings are extended from the electrode member; and

a first insulation section inserted into the tube and having a plurality of first holes through which the wirings are inserted, respectively.

2. The stage of claim 1, further comprising a filling member interposed between an inner wall of the tube and the first insulation section, so that a gap distance between the tube and the first insulation section is uniform along the inner wall of the tube.

3. The stage of claim 2, wherein the filling member includes a protrusion making contact with the first insulation section.

4. The stage of claim 1, wherein the electrode member in the plate includes a heating electrode for generating heat and the base includes a base plate on which the body is mounted and a buffer interposed between the base plate and the tube of the body, the buffer having a thermal expansion ratio higher than that of the tube of the body and lower than that of the base plate.

5. The stage of claim 4, wherein the first insulation section penetrates though the buffer and the base plate of the base, so that the first insulation section is extended to the exterior of the stage.

6. The stage of claim 4, wherein the buffer includes a first through-hole connected to the tube and the base plate includes a second through-hole connected to the first through-hole and the tube, and further comprises a second insulation section combined to the first insulation section through the first and second through-holes, the second insulation section including a plurality of second holes through which the wirings are individually inserted.

7. The stage of claim 4, further comprising a protection block interposed between the plate and the base plate and enclosing the tube of the body, so that the base plate is covered with the protection block and is protected from processing gases for processing the substrate.

8. The stage of claim 7, wherein the protection block is spaced apart from the plate having the heating electrode, to thereby prevent heat transfer from the plate to the protection block.

9. The stage of claim 8, wherein a gap distance between the protection block and the plate is in a range of about 0.05 mm to about 7 mm.

10. The stage of claim 7, wherein the protection block is separated into at least two portions.

11. The stage of claim 4, further comprising a first sealing unit interposed between the tube and the buffer and a second sealing unit interposed between the base plate and the buffer, so that the interior of the tube is sealed off from the exterior of the tube by the first and second sealing units.

12. The stage of claim 4, further comprising a first joint member for combining the tube and the buffer and a second joint member for combining the buffer and the base plate.

13. A stage for supporting a substrate, comprising:

a body on which the substrate is positioned, the body including a plate having a heating electrode for generating heat therein and a tube protruded from a bottom surface of the plate;

a base plate on which the body is mounted; and

a buffer interposed between the base plate and the tube and having a thermal expansion ratio higher than that of the tube of the body and lower than that of the base plate.

14. The stage of claim 13, further comprising a protection block interposed between the plate and the base plate and enclosing the tube of the body, so that the base plate is covered with the protection block and is protected from processing gases for processing the substrate.

15. An apparatus for processing a substrate, comprising:

a process chamber having a space in which the substrate is processed;

a gas supplier connected to the process chamber and through which process gases for processing the substrate is supplied into the process chamber; and

a stage positioned in the process chamber and supporting the substrate,

wherein the stage includes;

a body on which the substrate is positioned, the body including a plate having an electrode member therein and a tube protruded from a bottom surface of the plate and through which wirings are extended from the electrode member; and

a first insulation section inserted into the tube and having a plurality of first holes through which the wirings are inserted, respectively.

16. The apparatus of claim 15, wherein the electrode member in the plate includes a heating electrode for generating heat and the base includes a base plate on which the body is mounted and a buffer interposed between the base plate and the tube of the body, the buffer having a thermal expansion ratio higher than that of the tube of the body and lower than that of the base plate.

17. The apparatus of claim 16, wherein the stage further includes a protection block interposed between the plate and the base plate and enclosing the tube of the body, so that the base plate is covered with the protection block and is protected from processing gases for processing the substrate.