Apparatus For Converting Electrical Energy For Conductively Heating Semiconductor Material In Rod Form
First Claim
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1. A three-phase converter arrangement for converting electrical energy with impressed system voltage into a process-dependent variable electrical energy for conductively heating rod-shaped semiconductor materials, comprising:
- (A) a three-phase primary winding, which is connected to the supply system, and(B) three secondary windings, wherein each of the three secondary windings of the installation transformer has more than two voltage taps with a power controller connected downstream, and(C) three heating circuits comprising the secondary windings and the heated semiconductor materials, which are connected in star connection for the separate regulation of the heating energies by means of the load resistances, wherein the power components of the controllers are locally arranged directly at the three-phase transformer.
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Abstract
The present invention relates to an apparatus for converting electrical energy for conductively heating rod-shaped semiconductor materials. The apparatus is particularly useful to control the temperature of electrically heated rods in the Siemens process for deposition of silicon by chemical vapor deposition.
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12 Claims
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1. A three-phase converter arrangement for converting electrical energy with impressed system voltage into a process-dependent variable electrical energy for conductively heating rod-shaped semiconductor materials, comprising:
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(A) a three-phase primary winding, which is connected to the supply system, and (B) three secondary windings, wherein each of the three secondary windings of the installation transformer has more than two voltage taps with a power controller connected downstream, and (C) three heating circuits comprising the secondary windings and the heated semiconductor materials, which are connected in star connection for the separate regulation of the heating energies by means of the load resistances, wherein the power components of the controllers are locally arranged directly at the three-phase transformer. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 12)
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11. A three-phase converter arrangement for converting electrical energy with impressed system voltage into a process-dependent variable electrical energy for conductively heating rod-shaped semiconductor materials, comprising:
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(A) a three-phase primary winding, which is connected to the supply system, and (B) three secondary windings, wherein each of the three secondary windings of the installation transformer has more than two voltage taps with a power controller connected downstream, and (C) three heating circuits comprising the secondary windings and the heated semiconductor materials, which are connected in potential-isolated fashion with a separate individual current feedback per phase, for the separate regulation of the heating energies by means of the load resistances, wherein the power components of the controllers are locally arranged directly at the three-phase transformer.
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Specification