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APPARATUS FOR PRODUCING TRICHLOROSILANE, AND METHOD FOR PRODUCING TRICHLOROSILANE

  • US 20090297708A1
  • Filed: 05/27/2009
  • Published: 12/03/2009
  • Est. Priority Date: 05/28/2008
  • Status: Active Grant
First Claim
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1. An apparatus for producing trichlorosilane, comprising:

  • a reactor provided with gas inlets and gas outlets;

    a plurality of silicon seed rods held in the reactor;

    a heating apparatus that is provided in the reactor and heats the silicon seed rods; and

    a raw material gas supply system that is connected to the gas inlets and capable of selecting and supplying one of a first raw material gas for depositing polycrystalline silicon which contains trichlorosilane and hydrogen gas and a second raw material gas for producing trichlorosilane which contains silicon tetrachloride and hydrogen gas,wherein when the raw material gas supply system supplies the second raw material gas into the reactor, the silicon tetrachloride and hydrogen gas are reacted to produce a reaction product gas containing trichlorosilane.

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