SYSTEM AND METHOD FOR MAKING A GRADED BARRIER COATING
First Claim
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1. An assembly comprising:
- a device; and
a graded-composition barrier coating disposed on a surface of said device, said coating comprising;
a first zone defined by a first thickness comprising a first material and a second material wherein a composition of said first zone varies substantially continuously across said first thickness; and
a second zone defined by a second thickness which is substantially free of any of said first material.
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Abstract
Methods and apparatus are disclosed relating to graded-composition barrier coatings comprising first and second materials in first and second zones. The compositions of one or both zones vary substantially continuously across a thickness of the zone in order to achieve improved properties such as barrier, flexibility, adhesion, optics, thickness and tact time. The graded-composition barrier coatings find utility in preventing exposure of devices such as organic electro-luminescent devices (OLEDs) to reactive species found in the environment.
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Citations
67 Claims
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1. An assembly comprising:
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a device; and a graded-composition barrier coating disposed on a surface of said device, said coating comprising; a first zone defined by a first thickness comprising a first material and a second material wherein a composition of said first zone varies substantially continuously across said first thickness; and a second zone defined by a second thickness which is substantially free of any of said first material. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13, 14, 15, 16, 17, 18, 19, 20, 21, 22, 23, 24)
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25. A method of forming a barrier coating, the method comprising:
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providing a device having a surface; and depositing on said surface a graded-composition barrier coating comprising; a first zone defined by a first thickness comprising a first material and a second material wherein a composition of said first zone varies substantially continuously across said first thickness; and a second zone defined by a second thickness which is substantially free of any of said first material. - View Dependent Claims (26, 27, 28, 29, 30, 31, 32, 33, 34, 35, 36, 37, 38, 39, 40, 41, 42, 43, 44, 45, 46, 47, 48, 49, 50)
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51. An assembly comprising:
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a substrate; an electronic device disposed on said substrate; and a graded-composition barrier coating disposed along a surface of said electronic device and being substantially transparent to visible light, said coating comprising; a first zone defined by a first thickness in which a composition of an inorganic material and a composition of an organic material each vary substantially continuously across said first thickness and wherein said first thickness is between approximately 5 nm and approximately 1000 nm; and a second zone defined by a second thickness which is substantially free of any organic material. - View Dependent Claims (52, 53, 54, 55, 56, 57, 58)
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59. A method of forming a barrier coating, the method comprising:
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providing a substrate; providing an electronic device disposed on said substrate; and depositing on said electronic device via plasma-enhanced chemical-vapor deposition a graded-composition barrier coating which is substantially transparent to visible light, wherein said coating comprises; a first zone defined by a first thickness in which a composition of an inorganic material and a composition of an organic material each vary substantially continuously across said first thickness and wherein said second thickness is between approximately 5 nm and approximately 1000 nm; and a second zone defined by a second thickness which is substantially free of any organic material. - View Dependent Claims (60, 61, 62, 63, 64, 65, 66, 67)
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Specification