Extreme low resistivity light attenuation anti-reflection coating structure in order to increase transmittance of blue light and method for manufacturing the same
First Claim
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1. An extreme low resistivity light attenuation anti-reflection coating structure in order to increase transmittance of blue light, comprising:
- a substrate; and
a coating module formed on a front surface of the substrate and composed of a plurality of silicon carbide compound coating layers, a plurality of Al-based oxide coating layers and a plurality of metal coating layers that are alternately stacked onto each other.
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Abstract
An extreme low resistivity light attenuation anti-reflection coating structure in order to increase transmittance of blue light, includes a substrate and a coating module. The coating module is formed on a front surface of the substrate and composed of a plurality of silicon carbide compound coating layers, a plurality of Al-based oxide coating layers and a plurality of metal coating layers that are alternately stacked onto each other.
27 Citations
20 Claims
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1. An extreme low resistivity light attenuation anti-reflection coating structure in order to increase transmittance of blue light, comprising:
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a substrate; and a coating module formed on a front surface of the substrate and composed of a plurality of silicon carbide compound coating layers, a plurality of Al-based oxide coating layers and a plurality of metal coating layers that are alternately stacked onto each other. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10)
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11. A method for manufacturing an extreme low resistivity light attenuation anti-reflection coating structure in order to increase transmittance of blue light, comprising:
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providing a substrate; and forming a coating module on a front surface of the substrate, wherein the coating module is composed of a plurality of silicon carbide compound coating layers, a plurality of Al-based oxide coating layers and a plurality of metal coating layers that are alternately stacked onto each other. - View Dependent Claims (12, 13, 14, 15, 16, 17, 18, 19, 20)
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Specification