Liquid holding apparatus, liquid holding method, exposure apparatus, exposing method, and device fabricating method
First Claim
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1. A liquid holding apparatus which holds a liquid in a prescribed region between a first object and a second object, comprising:
- an electrostatic holder which holds the liquid by electrostatic force.
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Abstract
Liquid is held in a prescribed region between a first object and a second object. An electrostatic holder holds the liquid by electrostatic force.
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Citations
40 Claims
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1. A liquid holding apparatus which holds a liquid in a prescribed region between a first object and a second object, comprising:
an electrostatic holder which holds the liquid by electrostatic force. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13, 14)
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15. A liquid holding method for holding liquid in a prescribed region between a first object and a second object, the method comprising:
holding liquid with electrostatic force.
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16. An immersion exposure apparatus which exposes a substrate with exposure light via a liquid in an immersion space, comprising:
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an immersion member that has a predetermined face and between which and a surface of an object the immersion space can be formed, the object facing the predetermined face; and a supply port that supplies a liquid to the immersion space, wherein the immersion space is formed with the liquid which is charged to a prescribed polarity in order to set an interface of the liquid of the immersion space to a prescribed state. - View Dependent Claims (17, 18, 19, 20, 21, 22, 23, 24, 25, 26, 27, 28, 29, 30, 31, 32, 33, 34, 35, 36, 37, 38)
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39. An exposure method which exposes a substrate with exposure light via a liquid in an immersion space, the method comprising:
forming the immersion space with a liquid which is charged to a prescribed polarity in order to set an interface of the liquid of the immersion space to a prescribed state. - View Dependent Claims (40)
Specification