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Liquid holding apparatus, liquid holding method, exposure apparatus, exposing method, and device fabricating method

  • US 20090297990A1
  • Filed: 04/30/2009
  • Published: 12/03/2009
  • Est. Priority Date: 10/31/2006
  • Status: Abandoned Application
First Claim
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1. A liquid holding apparatus which holds a liquid in a prescribed region between a first object and a second object, comprising:

  • an electrostatic holder which holds the liquid by electrostatic force.

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