SELF-TILTED MICROMIRROR DEVICE
First Claim
Patent Images
1. A self-tilted micromirror device comprising:
- a) a substrate;
b) at least one stiction plate configured to be attracted to the substrate by adhesion force;
c) a top plate coupled to the stiction plate elastically and configured to have at least one motion when the stiction plate is attracted to the substrate; and
d) at least one pivot structure disposed between the substrate and the top plate and configured to provide a tilting point or area for the motion of the top plate;
wherein the motion of the top plate is determined by the geometry of the micro-structures of the self-tilted micromirror device.
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Abstract
A self-tilted micromirror device of the present invention comprises a plurality of micro-structures including a substrate, at least one stiction plate configured to be attracted to the substrate by adhesion force, a top plate coupled to the stiction plate elastically and configured to have at least one motion when the stiction plate is attracted to the substrate, and at least one pivot structure disposed between the substrate and the top plate and configured to provide a tilting point or area for the motion of the top plate. The motion of the top plate is determined by the geometry of the micro-structures of the self-tilted micromirror device.
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Citations
25 Claims
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1. A self-tilted micromirror device comprising:
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a) a substrate; b) at least one stiction plate configured to be attracted to the substrate by adhesion force; c) a top plate coupled to the stiction plate elastically and configured to have at least one motion when the stiction plate is attracted to the substrate; and d) at least one pivot structure disposed between the substrate and the top plate and configured to provide a tilting point or area for the motion of the top plate; wherein the motion of the top plate is determined by the geometry of the micro-structures of the self-tilted micromirror device. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13, 14, 15, 16, 17, 18, 19, 20)
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21. A self-tilted micromirror device comprising:
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a) a substrate; b) at least one stiction plate configured to be attracted to the substrate by adhesion force; c) a top plate configured to have at least one motion when the stiction plate is attracted to the substrate; d) at least one top plate post configured to provide a space between the top plate and the stiction plate; e) at least one top plate spring structure connecting the stiction plate and the top plate post; and d) at least one pivot structure disposed between the substrate and the top plate and configured to provide a tilting point or area for the motion of the top plate; wherein the motion of the top plate is determined by the geometry of the micro-structures.
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22. A self-tilted micromirror device comprising:
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a) a substrate; b) at least one stiction plate configured to be attracted to the substrate by adhesion force; c) a top plate coupled to the stiction plate elastically and configured to have at least one motion when the stiction plate is attracted to the substrate; and d) at least one pivot structure connecting the substrate and the top plate and configured to be bent and provide a tilting point or area for the motion of the top plate; wherein the motion of the top plate is determined by the geometry of the micro-structures.
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23. A self-tilted micromirror device comprising:
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a) a substrate; b) at least one stiction plate configured to be attracted to the substrate by adhesion force; c) a top plate coupled to the stiction plate elastically and configured to have at least one motion when the stiction plate is attracted to the substrate; d) at least one pivot structure disposed between the substrate and the top plate and configured to provide a tilting point or area for the motion of the top plate; and e) at least one support structure disposed on the substrate and connected to the stiction plate by at least one substrate spring structure; wherein the motion of the top plate is determined by the geometry of the micro-structures.
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24. A self-tilted micromirror device comprising:
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a) a substrate; b) at least one stiction plate configured to be attracted to the substrate by adhesion force; c) a top plate connected to the stiction plate by at least one top plate spring structure and configured to have at least one motion when the stiction plate is attracted to the substrate; d) at least one pivot structure disposed between the substrate and the top plate and configured to provide a tilting point or area for the motion of the top plate; and e) at least one support structure disposed on the substrate and connected to the stiction plate by at least one substrate spring structure; wherein the motion of the top plate is determined by the geometry of the micro-structures.
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25. A self-tilted micromirror device comprising:
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a) a substrate; b) at least one stiction plate configured to be attracted to the substrate by adhesion force; c) a top plate coupled to the stiction plate elastically and configured to have at least one motion when the stiction plate is attracted to the substrate; d) at least one pivot structure disposed between the substrate and the top plate and configured to provide a tilting point or area for the motion of the top plate; e) at least one support structure disposed on the substrate and connected to the stiction plate by at least one substrate spring structure; and f) at least one dimple structure disposed between the substrate and the top plate and configured to provide a space between the stiction plate and the top plate; wherein the motion of the top plate is determined by the geometry of the micro-structures.
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Specification