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SELF-TILTED MICROMIRROR DEVICE

  • US 20090303569A1
  • Filed: 05/20/2008
  • Published: 12/10/2009
  • Est. Priority Date: 05/20/2008
  • Status: Abandoned Application
First Claim
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1. A self-tilted micromirror device comprising:

  • a) a substrate;

    b) at least one stiction plate configured to be attracted to the substrate by adhesion force;

    c) a top plate coupled to the stiction plate elastically and configured to have at least one motion when the stiction plate is attracted to the substrate; and

    d) at least one pivot structure disposed between the substrate and the top plate and configured to provide a tilting point or area for the motion of the top plate;

    wherein the motion of the top plate is determined by the geometry of the micro-structures of the self-tilted micromirror device.

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