MANUFACTURING METHOD OF THREE-DIMENSIONAL STRUCTURE

• US 20090304928A1
• Filed: 06/04/2009
• Published: 12/10/2009
• Est. Priority Date: 06/09/2008
• Status: Active Grant

• Current Assignee: Canon Kabushiki Kaisha (Canon Inc.)
• Original Assignee: Canon Kabushiki Kaisha (Canon Inc.)
• Inventors: Kaneda, Yasushi, Asano, Kosuke, Isano, Taisuke
• Granted Patent: US 8,309,176 B2
• Time in Patent Office: Days
• US Class Current: 427/270
• CPC Class Codes: B05D 5/00 Processes for applying liquids or other fluent materials to surfaces to obtain special surface effects, finishes or structures
• CPC Class Codes: B81C 1/00126 Static structures not provided for in groups B81C1/00031 - B81C1/00119
• CPC Class Codes: B81C 2201/0108 Sacrificial polymer, ashing of organics
• CPC Class Codes: B81C 2203/038 Bonding techniques not provided for in B81C2203/031 - B81C2203/037

Abstract

A method for manufacturing a three-dimensional structure includes forming a first structure having a relief pattern on a substrate, forming a sacrifice layer on the first structure such that the sacrifice layer can be filled in a concave part of the first structure and the sacrifice layer can cover a surface of a convex part of the first structure on a side opposite to the substrate, forming a second structure having a relief pattern on the sacrifice layer, and a fourth step of removing the sacrifice layer from between the first structure and the second structure, and thereby bringing the second structure into contact with the surface of the first structure.

Claims

1. A method for manufacturing a three-dimensional structure, comprising:

a first step of forming a first structure having a relief pattern on a substrate;

a second step of forming a sacrifice layer on the first structure such that the sacrifice layer can be filled in a concave part of the first structure and the sacrifice layer can cover a surface of a convex part of the first structure on a side opposite to the substrate;

a third step of forming a second structure having a relief pattern on the sacrifice layer; and

a fourth step of removing the sacrifice layer from between the first structure and the second structure, and thereby bringing the second structure into contact with the surface of the first structure.

2. The method according to claim 1, wherein the first step forms a layer of the first structure on the substrate.

3. The method according to claim 1, wherein the first step processes the substrate and forms the relief pattern.

4. The method according to claim 1, further comprising the steps of:

forming, after the fourth step, the sacrifice layer on the second structure such that the sacrifice layer can be filled in a concave part of the second structure and the sacrifice layer can cover a surface of a convex part of the second structure on the side opposite to the substrate;

forming a third structure having a relief pattern on the sacrifice layer; and

removing the sacrifice layer.

5. The method according to claim 1, further comprising, between the third step and the fourth step:

forming the sacrifice layer on the second structure such that the sacrifice layer can be filled in a concave part of the second structure and the sacrifice layer can cover a surface of a convex part of the second structure on the side opposite to the substrate; and

forming a third structure having a relief pattern on the sacrifice layer,

wherein the fourth step simultaneously removes a plurality of sacrifice layers.

6. The method according to claim 1, wherein in forming a structure of a plurality of first layers of the three-dimensional structure, the fourth step simultaneously removes a plurality of sacrifice layers, and in forming a structure of a plurality of second layers more fragile than the structure of the plurality of first layers, the fourth step removes the sacrifice layers one by one.

7. The method according to claim 1, wherein the fourth step uses a dry process that uses a pressure of 10 Pa or higher.