Electrochemical Apparatus With Barrier Layer Protected Substrate
First Claim
1. The method of fabricating an electrochemical apparatus comprising the following steps:
- (a) providing a metallic, a polymeric, or a doped or undoped silicon substrate with a first and a second side;
(b) depositing a first barrier layer on said first side;
(c) depositing a second barrier layer on said second side;
(d) fabricating a first electrochemically active cell on said first side on top of said first barrier layer, which chemically separates said first electrochemically active cell from said substrate;
(e) fabricating a second electrochemically active cell on said second side on top of said second barrier layer, which chemically separates said second electrochemically active cell from said substrate;
(f) composing said first barrier layer of a plurality of chemically different sublayers; and
(g) composing said second barrier layer of a plurality of chemically different sublayers.
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Abstract
The present invention relates to apparatus, compositions and methods of fabricating high performance thin-film batteries on metallic substrates, polymeric substrates, or doped or undoped silicon substrates by fabricating an appropriate barrier layer composed, for example, of barrier sublayers between the substrate and the battery part of the present invention thereby separating these two parts chemically during the entire battery fabrication process as well as during any operation and storage of the electrochemical apparatus during its entire lifetime. In a preferred embodiment of the present invention thin-film batteries fabricated onto a thin, flexible stainless steel foil substrate using an appropriate barrier layer that is composed of barrier sublayers have uncompromised electrochemical performance compared to thin-film batteries fabricated onto ceramic substrates when using a 700° C. post-deposition anneal process for a LiCoO2 positive cathode.
102 Citations
22 Claims
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1. The method of fabricating an electrochemical apparatus comprising the following steps:
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(a) providing a metallic, a polymeric, or a doped or undoped silicon substrate with a first and a second side; (b) depositing a first barrier layer on said first side; (c) depositing a second barrier layer on said second side; (d) fabricating a first electrochemically active cell on said first side on top of said first barrier layer, which chemically separates said first electrochemically active cell from said substrate; (e) fabricating a second electrochemically active cell on said second side on top of said second barrier layer, which chemically separates said second electrochemically active cell from said substrate; (f) composing said first barrier layer of a plurality of chemically different sublayers; and (g) composing said second barrier layer of a plurality of chemically different sublayers. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13, 14, 15, 16, 17, 18, 19, 20, 21, 22)
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Specification