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Method for scanning the surface of a workpiece

  • US 20090307916A1
  • Filed: 04/19/2006
  • Published: 12/17/2009
  • Est. Priority Date: 04/25/2005
  • Status: Active Grant
First Claim
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1. A method for measuring a surface profile using a surface sensing device mounted on a probe head, the probe head including a drive for producing rotational movement of the surface sensing device about one or more axis, the method comprising the following steps, in any suitable order:

  • (a) moving the probe head along a nominal path relative to the surface profile;

    (b) determining an at least approximation of the surface normal of the surface profile;

    (c) sensing the surface profile with the surface sensing device;

    (d) and adjusting the distance or force of the surface sensing device relative to the surface profile substantially in the direction of the surface normal.

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