SHOWER PLATE AND MANUFACTURING METHOD THEREOF, AND PLASMA PROCESSING APPARATUS, PLASMA PROCESSING METHOD AND ELECTRONIC DEVICE MANUFACTURING METHOD USING THE SHOWER PLATE
First Claim
1. A shower plate disposed in a plasma processing apparatus and provided with a plurality of gas discharge holes for discharging a plasma excitation gas to generate plasma in the apparatus,wherein at least one gas discharge hole is provided in ceramics members, each being installed in each of a multiplicity of vertical holes opened in the shower plate, and an aspect ratio of a length of the gas discharge hole to a hole diameter thereof (length/hole diameter) is equal to or greater than about 20.
1 Assignment
0 Petitions
Accused Products
Abstract
Provided is a shower plate capable of more securely preventing the occurrence of backflow of plasma and enabling efficient plasma excitation. A shower plate 106 is disposed in a processing chamber 102 of a plasma processing apparatus and is provided with a plurality of gas discharge holes 113a for discharging a plasma excitation gas to generate plasma in the processing chamber 102, wherein an aspect ratio of a length of the gas discharge hole to a hole diameter thereof (length/hole diameter) is equal to or greater than about 20. The gas discharge holes 113a are made of ceramics members 113 which are separated from the shower plate 106, and the ceramics members 113 are installed in vertical holes 105 opened in the shower plate 106.
50 Citations
16 Claims
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1. A shower plate disposed in a plasma processing apparatus and provided with a plurality of gas discharge holes for discharging a plasma excitation gas to generate plasma in the apparatus,
wherein at least one gas discharge hole is provided in ceramics members, each being installed in each of a multiplicity of vertical holes opened in the shower plate, and an aspect ratio of a length of the gas discharge hole to a hole diameter thereof (length/hole diameter) is equal to or greater than about 20.
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13. A manufacturing method for a shower plate comprising:
inserting a green body, a debound body, a tentatively sintered body or a sintered body of a ceramics member having one or more gas discharge holes into a vertical hole of a green body, a debound body or a tentatively sintered body of a shower plate having the vertical hole formed by molding raw material powder, and then sintering them at the same time.
Specification