METHOD FOR DETERMINATION OF ELECTRICAL PROPERTIES OF ELECTRONIC COMPONETS AND METHOD FOR CALIBRATION OF A MEASURING UNIT
First Claim
1. A method for calibration of a measurement unit for determination of electrical properties of electrical components, comprising the following steps:
- preparing at least one planar calibration standard;
producing a single path on such calibration standard by electrical contacting;
obtaining a first measurement of an electrical measured quantity of the calibration standard at a first temperature, at which an electrical property of the calibration standard is known or to be determined by calculation, to determine an electrical property of the calibration standard;
obtaining a second measurement of the same electrical measured quantity of the calibration standard at a second temperature and determining change in the corresponding electrical property relative to the first measurement;
determining a temperature coefficient that describes relative change of the electrical property determined from the second measurement of the calibration standard referred to that determined from the first measurement;
determining a corrected electrical property of the calibration standard at a measurement temperature by using a value of the temperature coefficient applicable for the measurement temperature to the electrical property of the calibration standard determined at the first temperature; and
determining at least one error coefficient of the measurement unit from said corrected electrical property of the calibration standard, which describes relative change of the corrected electrical property of the calibration standard relative to the value measured at the measurement temperature.
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Accused Products
Abstract
In a method for calibration of a measurement unit for determination of electrical properties of electronic components using at least one planar calibration standard, an electrical measurement quantity is measured at two different temperatures. The electrical property of the calibration standard is known at at least one temperature or is to be determined by calculation. A temperature coefficient is determined from both measured quantities, which describes the relative change of the electrical property of the calibration standard accompanying the temperature change and with which the electrical property of the calibration standard is determined at a measurement temperature. From the change in electrical property, an error coefficient of the measurement unit is determined. A method is also provided for determination of an electrical property of an electronic component, using the calibration method.
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Citations
16 Claims
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1. A method for calibration of a measurement unit for determination of electrical properties of electrical components, comprising the following steps:
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preparing at least one planar calibration standard; producing a single path on such calibration standard by electrical contacting; obtaining a first measurement of an electrical measured quantity of the calibration standard at a first temperature, at which an electrical property of the calibration standard is known or to be determined by calculation, to determine an electrical property of the calibration standard; obtaining a second measurement of the same electrical measured quantity of the calibration standard at a second temperature and determining change in the corresponding electrical property relative to the first measurement; determining a temperature coefficient that describes relative change of the electrical property determined from the second measurement of the calibration standard referred to that determined from the first measurement; determining a corrected electrical property of the calibration standard at a measurement temperature by using a value of the temperature coefficient applicable for the measurement temperature to the electrical property of the calibration standard determined at the first temperature; and determining at least one error coefficient of the measurement unit from said corrected electrical property of the calibration standard, which describes relative change of the corrected electrical property of the calibration standard relative to the value measured at the measurement temperature. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13, 14, 15, 16)
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Specification