ACCURATE CONVEYANCE SYSTEM USEFUL FOR SCREEN PRINTING

• US 20090314201A1
• Filed: 10/23/2008
• Published: 12/24/2009
• Est. Priority Date: 06/19/2008
• Status: Abandoned Application

• Current Assignee: Applied Materials Incorporated
• Original Assignee: Applied Materials Incorporated
• Inventors: Baccini, Andrea
• Application Number:
  US12/257,159
• Publication Number:
  US 20090314201A1
• Time in Patent Office: Days
• US Class Current: 118/500
• CPC Class Codes: B41F 15/18 Supports for workpieces
• CPC Class Codes: B41F 15/26 for articles with flat surfaces
• CPC Class Codes: B65H 11/007 with front stop arrangements
• CPC Class Codes: B65H 2402/351 Turntables
• CPC Class Codes: B65H 2404/2571 Wrapping/unwrapping arrangement
• CPC Class Codes: B65H 2404/2693 Arrangement of belts on movable frame
• CPC Class Codes: B65H 2404/285 including readable marks, patterns, e.g. serving for control
• CPC Class Codes: B65H 2406/32 Suction belts
• CPC Class Codes: B65H 5/04 by movable tables or carriages rotary tables B65H5/18 ; suction gripper or gripper tables B65H5/10
• CPC Class Codes: B65H 5/224 by suction belts B65H11/005 takes precedence
• CPC Class Codes: B65H 9/12 carried by article grippers
• CPC Class Codes: H01L 21/67207 comprising a chamber adapted to a particular process
• CPC Class Codes: H01L 21/67748 horizontal transfer of a single workpiece
• CPC Class Codes: H01L 21/68764 characterised by a movable susceptor, stage or support, others than those only rotating on their own vertical axis, e.g. susceptors on a rotating caroussel
• CPC Class Codes: H01L 21/68771 characterised by supporting more than one semiconductor substrate
• CPC Class Codes: H05K 2201/09918 Optically detected marks used for aligning tool relative to the PCB, e.g. for mounting of components
• CPC Class Codes: H05K 2201/10151 Sensor
• CPC Class Codes: H05K 2203/0165 Holder for holding a Printed Circuit Board [PCB] during processing, e.g. during screen printing
• CPC Class Codes: H05K 3/0008 for aligning or positioning of tools relative to the circuit board H05K3/4638, H05K3/4679 take precedence; for manufacturing assemblages of components H05K13/0015
• CPC Class Codes: H05K 3/1216 by screen printing or stencil printing

Abstract

The present invention(s) provide an apparatus and method for processing substrates in a screen printing chamber that can deliver a repeatable and accurate screen printed pattern on one or more processed substrates. In one embodiment, the screen printing chamber is adapted to perform a screen printing process within a portion of a crystalline silicon solar cell production line in which a substrate is patterned with a desired material. In one embodiment, the screen printing chamber is a processing chamber positioned within the Rotary line tool or Softline™ tool available from Baccini S.p.A., which is owned by Applied Materials, Inc. of Santa Clara, Calif.

Claims

1. An apparatus for processing a substrate, comprising:

a material conveyor assembly comprising;

a platen having a substrate supporting surface;

a first material positioning mechanism that is adapted to provide a supporting material to the substrate supporting surface;

the supporting material having a first surface on which a plurality of features are formed; and

a second material positioning mechanism that is adapted to receive the supporting material transferred across at least a portion of the substrate supporting surface from the first material positioning mechanism;

one or more sensor assemblies disposed over the first surface, wherein the one or more sensor assemblies are positioned to sense the change in position of the plurality of features formed on the first surface; and

a controller adapted to receive a signal from the one or more sensor assemblies and control the position of the supporting material on the substrate supporting surface using an actuator coupled to the first material positioning mechanism or the second material positioning mechanism.

2. The apparatus of claim 1, wherein each of the one or more sensor assemblies further comprise:

an electromagnetic radiation source that is mounted proximate to the first surface of the supporting material and is adapted to emit electromagnetic radiation;

a detector that is mounted proximate to the first surface of the supporting material and is adapted to detect the variation of intensity of the electromagnetic radiation delivered from the electromagnetic radiation source after interacting with plurality of features formed on the first surface; and

a controller adapted to receive a signal from the detector and control the position of the supporting material on the substrate supporting surface.

3. The apparatus of claim 1, further comprising an inspection system comprising a first camera which is positioned to monitor a substrate disposed on the first surface of the supporting material, wherein the controller is adapted to position the substrate based on information received by the inspection system.

4. The apparatus of claim 1, wherein the supporting material is a continuous sheet of material that has one end coupled to the first material positioning mechanism and the opposing end coupled to the second material positioning mechanism.

5. The apparatus of claim 1, further comprising a conveyor that comprises at least one belt and a conveyor actuator coupled to the at least one belt, wherein the conveyor is positioned to transfer a substrate disposed on the at least one belt to the first surface of the supporting material.

6. The apparatus of claim 1, wherein the plurality of features includes pattern of regularly spaced regions of deposited material or holes within the supporting material.

7. The apparatus of claim 1, wherein each of the one or more sensor assemblies comprise a capacitive type sensor, an optical measurement sensor, or an eddy current measurement sensor.

12. The method of claim 7, wherein sensing the movement of the plurality of features comprises using a capacitive type sensor, an optical measurement sensor, or an eddy current sensor.

8. A method of processing a substrate, comprising:

receiving a substrate on a first surface of a support material, wherein the first surface has plurality of features formed thereon;

moving the support material across a surface of a substrate support;

sensing the movement of the plurality of features past a sensor assembly; and

controlling the position of the substrate on the surface of the substrate support based at least partially on the data received from the sensed movement of the plurality of features.

9. The method of claim 8, further comprising:

receiving the substrate on a first conveyor;

transferring the substrate from the first conveyor to the support material during the receiving the substrate on the first surface of the support material;

halting the moving support material across the surface of the substrate support when the substrate is in a first position; and

evacuating a region behind a second surface of the support material to hold the substrate disposed on the first surface to retain the substrate in the first position.

10. The method of claim 8, further comprising:

positioning the substrate in a screen printing chamber after controlling the position of the substrate on the surface of the substrate support; and

depositing a material on the substrate disposed in the screen printing chamber.

11. The method of claim 8, wherein sensing the movement of the plurality of features comprises:

emitting electromagnetic radiation from a source onto the first surface of the support material, wherein the emitted radiation interacts with the plurality of features formed thereon;

receiving an intensity of the electromagnetic radiation after the at least a portion of the electromagnetic radiation has interacted with the plurality of features; and

monitoring the intensity of the received electromagnetic radiation to determine the position of the substrate on the surface of the substrate support.

13. A method of processing a substrate, comprising:

receiving a substrate on a first surface of a support material, wherein the first surface has plurality of features formed thereon;

moving the support material across a surface of a substrate support using an actuator coupled to the supporting material;

emitting electromagnetic radiation from a source onto the first surface of the support material, wherein the emitted radiation striking the first surface interacts with the plurality of features formed thereon;

receiving an intensity of the electromagnetic radiation after the at least a portion of the electromagnetic radiation has interacted with the plurality of features; and

monitoring the intensity of the received electromagnetic radiation to determine the position of the substrate on the surface of the substrate support.

14. The method of claim 13, further comprising inspecting a first substrate disposed in the first position on the substrate support.

15. The method of claim 13, further comprising controlling the position of the substrate on the surface of the substrate support based at least partially on the data received from monitoring the intensity of the received electromagnetic radiation.

16. The method of claim 15, further comprising:

positioning the substrate in a screen printing chamber after controlling the position of the substrate; and

depositing a material on the substrate disposed on the substrate support using a screen printing process.

17. A support material used to support a substrate during processing, comprising:

a material having a first surface, and a first end and a second end;

a plurality of features formed on a region of the first surface which extends in a direction between the first end and second end,

wherein the material a sufficient thickness in a direction substantially perpendicular to the first surface to allow a air to pass through the thickness when a vacuum is applied to a side opposite to the first side of the material.

18. The support material of claim 17, wherein the plurality of features comprise an array of equally spaced lines.