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BAFFLE PLATE AND SUBSTRATE PROCESSING APPARATUS

  • US 20090314432A1
  • Filed: 06/12/2009
  • Published: 12/24/2009
  • Est. Priority Date: 06/23/2008
  • Status: Active Grant
First Claim
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1. A baffle plate provided in a processing chamber for processing a substrate therein such that the baffle plate is disposed around a mounting table for mounting the substrate thereon, the baffle plate having a plurality of gas exhaust holes, through which a gas is exhausted from the processing chamber,wherein the baffle plate has a stacked structure including a plurality of plate-shaped members, and the baffle plate includes a pressure adjustment gas supply passageway to supply a pressure adjustment gas for adjusting a pressure in the processing chamber.

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