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METHODS FOR PROCESSING SUBSTRATES COMPRISING METALLIC NANOPARTICLES

  • US 20090314628A1
  • Filed: 06/20/2008
  • Published: 12/24/2009
  • Est. Priority Date: 06/20/2008
  • Status: Active Grant
First Claim
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1. A method for processing a substrate comprising metallic nanoparticles comprising:

  • providing a substrate surface comprising metallic nanoparticles, and exposing the substrate surface to a plasma.

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