LINER-BASED LIQUID STORAGE AND DISPENSING SYSTEMS WITH EMPTY DETECTION CAPABILITY

• US 20090314798A1
• Filed: 04/25/2006
• Published: 12/24/2009
• Est. Priority Date: 04/25/2005
• Status: Active Grant

• Current Assignee: Advanced Technology Materials, Inc. (Entegris Incorporated)
• Original Assignee: Advanced Technology Materials, Inc. (Entegris Incorporated)
• Inventors: Hovinen, Minna, Van Buskirk, Peter C., Ware, Donald D., Mikkelsen, Kirk, O'Dougherty, Kevin T., Tom, Glenn M., Kingery, John R.
• Granted Patent: US 8,322,571 B2
• Time in Patent Office: Days
• US Class Current: 222/23
• CPC Class Codes: B01J 2219/00065 Pressure measurement
• CPC Class Codes: B01J 2219/00067 Liquid level measurement
• CPC Class Codes: B01J 2219/00069 Flow rate measurement
• CPC Class Codes: B01J 2219/00164 controlling the flow
• CPC Class Codes: B01J 4/02 for feeding measured , i.e. prescribed quantities of reagents
• CPC Class Codes: B65D 83/0061 the contents of a flexible bag being expelled by the contracting forces inherent in the bag or a sleeve fitting snugly around the bag
• CPC Class Codes: G01F 23/18 Indicating, recording or alarm devices actuated electrically

Abstract

Fluid supply systems for storage and dispensing of chemical reagents and compositions, e.g., high purity liquid reagents and chemical mechanical polishing compositions used to manufacture microelectronic device products, having capability for detection of an empty or near-empty condition when the contained liquid is at or approaching depletion during dispensing operation. Fluid delivery systems employing empty detect arrangements are described, including pressure transducer monitoring of dispensed material intermediate the supply package and a servo-hydraulic dispense pump, or monitoring of dispenser chamber replenishment times in a dispenser being replenished on a cyclic schedule to flow material from the dispenser to a downstream tool utilizing the dispensed material.

Claims

1-149. -149. (canceled)

150. A liner package dispensing system comprising:

a vessel having an interior volume;

a liner in said interior volume, arranged to contain a liquid medium subject to being overlaid by head space gas;

a reservoir arranged to receive and contain said liquid medium to define a liquid medium level in or above the reservoir when said liquid medium is present in said reservoir;

a dispense line coupling the liner in fluid communication with said reservoir;

a liquid medium flow line coupled with the reservoir to discharge liquid medium therefrom;

at least one sensor arranged to detect at least one level of said liquid medium in or above the reservoir;

at least one gas communication line coupling the reservoir to (i) a first flow control valve in fluid communication with a vent, and (ii) a second flow control valve in fluid communication with a source of pressurization gas, wherein the first flow control valve is operatively coupled to receive a signal from said at least one sensor, and responsively accommodate venting of said reservoir, and wherein said second flow control valve is operatively coupled to receive a signal from said at least one sensor, and responsively accommodate dispensation of liquid medium from the reservoir; and

a pressure switch or transducer in sensory communication with said dispense line, operatively arranged (a) to detect an empty or near-empty condition of the liner, and (b) upon detection of said empty or near-empty condition of the liner, to effectuate operation one of said first and second flow control valves for continued dispensing of the liquid medium from the reservoir after said empty or near-empty condition has been detected.

151. The liner package dispensing system of claim 150, further comprising a check valve communicatively coupled in said dispense line to accommodate flow of liquid medium from the liner to the reservoir.

152. The liner package dispensing system of claim 150, further comprising a third flow control valve fluidically coupled with the liquid medium flow line, wherein said at least one sensor is operatively arranged to open or close any of said first flow control valve, second flow control valve, and third flow control valve.

153. The liner package dispensing system of claim 150, wherein said at least one sensor comprises a first sensor and a second sensor, and wherein the second sensor is disposed at a higher level than said first sensor.

154. The liner package dispensing system of claim 150, further comprising a drive train adapted to generate drive train pressure for application to the liner to cause pressure dispensing of the liquid medium from the liner to the reservoir via the dispense line.

155. A fluid storage and dispensing system, comprising:

a vessel having an interior volume;

a liner in said interior volume, said liner arranged to contain a liquid medium;

a dispensing assembly adapted to engage the vessel and to withdraw liquid medium from the liner during dispensing operation; and

an integrated flowmeter arranged to monitor withdrawal of said liquid medium from the liner during dispensing operation, and to generate an output correlative of an empty-detect condition upon occurrence of said empty-detect condition.

156. The fluid storage and dispensing system of claim 155, wherein the integrated flowmeter monitors the liquid medium dispensing rate and generates said output in response to a substantial diminution of flow rate of the liquid medium as said empty-detect condition.

157. The liner package dispensing system of claim 155, further comprising a drive train adapted to generate drive train pressure for application to the liner to cause pressure dispensing of the liquid medium from the liner to the reservoir via the dispense line.

158. The fluid storage and dispensing system of claim 155, further comprising:

a radio frequency-responsive controller adapted to terminate the dispensing operation in response to received information indicating the occurrence of an empty-detect condition, and

a radio frequency identification tag on at least one of the liner and the vessel, wherein said radio frequency identification tag includes a radio frequency antenna arranged to communicate information from the radio frequency identification tag to the controller, and said integrated flowmeter is arranged to feed said output to said radio frequency identification tag, whereby the generation of said output indicative of said empty-detect condition is communicated to said radio frequency identification tag and corresponding information indicative of said empty-detect condition is transmitted by said radio frequency antenna to said radio frequency-responsive controller to terminate the dispensing operation upon occurrence of the empty-detect condition.

159. The fluid storage and dispensing system of claim 155, further comprising a controller adapted to receive said output from the integrated flowmeter, and to responsively terminate the dispensing operation.

160. A material dispensing system including a material storage and dispensing package containing a liner therein, adapted to hold a material for pressure-dispensing thereof, wherein the package is coupled by a dispense line to a dispensed material-utilizing tool, and the dispense line is coupled to a dispenser arranged to receive a process liquid on a cyclic replenishment schedule from said package, for flow to the tool, and a monitor adapted to detect time required for replenishment of the dispenser indicative of approach to an empty state of the package and to responsively provide an output indicative of said approach.

161. The material dispensing system of claim 160, wherein said process liquid comprises a microelectronic device manufacturing reagent.

162. The material dispensing system of claim 160, adapted to responsively terminate the dispensing operation responsive to said output.

163. A fluid storage and dispensing system, comprising:

a vessel having an interior volume;

a liner in said interior volume, said liner arranged to contain a liquid medium;

a dispensing assembly adapted to engage the vessel and to withdraw liquid medium from the liner during dispensing operation;

at least one pressure sensor arranged to monitor at least one condition indicative of withdrawal of said liquid medium from the liner during dispensing operation, and to generate an output correlative of an empty-detect condition upon occurrence of said empty-detect condition;

a dispense line operatively coupled to the dispense assembly to dispense said liquid medium at a dispense line pressure; and

a drive train adapted to generate drive train pressure for application to the liner to cause pressure dispensing of the liquid medium from the liner;

wherein the at least one pressure sensor is arranged to generate an output indicative of an empty-detect condition in response to a differential between said drive train pressure and said dispense line pressure, and said drive train is adapted to increase said drive train pressure responsive to said output so as to maintain a desired dispense line pressure.

164. The fluid storage and dispensing system of claim 163, wherein said at least one pressure sensor comprises a plurality of pressure sensors.

165. A liner package dispensing system comprising:

a vessel having an interior volume;

a liner in said interior volume and arranged to contain a liquid medium;

a dispensing assembly adapted for engagement with the vessel, to withdraw liquid medium from the liner during dispensing operation;

flow circuitry coupled with the dispensing assembly and arranged for flow therethrough of liquid medium during the dispensing operation;

a secondary volume of liquid medium arranged for dispensing so that dispensing of the secondary volume does not occur until a primary volume of liquid medium has been substantially dispensed, wherein said primary volume includes a first part of said liquid medium in said liner, and said secondary volume includes a second part of said liquid medium in said liner other than liquid medium constituting said primary volume; and

an empty detector arranged to monitor said dispensing operation and generate an empty-detect output when said secondary volume dispensing is initiated.

166. The liner package dispensing system of claim 165, further comprising a pressurized gas supply arranged to apply compressive gas pressure on the liner dispense said liquid medium from at least one of the primary volume and the secondary volume.

167. The liner package dispensing system of claim 165, wherein the dispensing assembly comprises a dispense head coupled with a dip tube, and the dip tube is adapted for flow therethrough of liquid medium from the liner during said dispensing operation.

168. The liner package dispensing system of claim 165, wherein the secondary volume of liquid medium is defined by a partitioned region in the liner.

169. The liner package dispensing system of claim 165, wherein said secondary volume is defined by a restricted sub-volume in said liner bounded by a flexible member secured to the liner, wherein said flexible member comprises any of following:

(a) a member welded to the liner;

(b) a V-shaped sheet element that is welded to an edge of the liner, with each side of the V-shaped sheet element welded to each side of the liner;

(c) a flat or slightly curved rectangular member that is welded to a flat section of the liner; and

(d) a disc-shaped member that is welded to a flat portion of the liner.

170. The liner package dispensing system of claim 165, wherein said empty detector is adapted to perform a detection scheme selected from the group consisting of:

detection of pressure decay in the flow of primary volume liquid medium through the flow circuitry;

detection of a load change incident to an increased load of dispensing the secondary volume of liquid medium in relation to load of dispensing the primary volume of liquid medium;

measurement of displacement of the secondary volume of liquid medium during dispensing operation, and detection of difference in compressive force or pressure required for dispensing the secondary volume of liquid medium in relation to compressive force or pressure required for dispensing the primary volume of liquid medium.

171. The liner package dispensing system of claim 165, wherein said empty detector comprises a pressure transducer arranged to detect pressure drop in the dispensed liquid medium and responsively generate said empty-detect output.

172. The liner package dispensing system of claim 165, further comprising an electrically powered pump for pumping of liquid medium during dispensing thereof, and wherein said empty detector is arranged to monitor amperage drawn by said pump to generate said empty-detect output when said amperage changes upon initiation of dispensing of liquid medium from the secondary volume.

173. The liner package dispensing system of claim 165, wherein the dispensing system further comprises a drive train arranged to generate pressure for application to the liner to cause pressure dispensing of the primary and secondary volumes of liquid medium, and wherein said empty detector is arranged to detect a change in drive train pressure required to maintain a predetermined pressure during transition from dispensing of liquid medium from said primary volume to said secondary volume.