Method and Device For Producing an Image
First Claim
1. A method for producing an image of an object using a particle beam that is scanned over the object, comprising:
- determining a parameter that is assigned to the particle beam;
determining whether a change has occurred in the parameter;
determining a location on the object at which the change occurred in the parameter;
returning the particle beam to the location; and
rescanning the particle beam over the object from the location onward.
1 Assignment
0 Petitions
Accused Products
Abstract
The invention relates to a method and to a device (1) for producing an image of an object (5) by means of a particle beam. According to the method and in the device (1), the particle beam is scanned by the object (5). The aim of the invention is to provide a method and a device for producing an image of an object (5) by means of a particle beam that can be used with a cold field emitter (2) in such a manner that a good image quality is constantly ensured. Said aim is achieved by virtue of the fact that, according to the invention, when a radiation parameter is altered, the object (5) is rescanned preferably with the corrected parameter. The inventive device (1) comprises the corresponding means (4, 6, 7) therefor.
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Citations
34 Claims
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1. A method for producing an image of an object using a particle beam that is scanned over the object, comprising:
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determining a parameter that is assigned to the particle beam; determining whether a change has occurred in the parameter; determining a location on the object at which the change occurred in the parameter; returning the particle beam to the location; and rescanning the particle beam over the object from the location onward. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 12, 13, 14)
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11. (canceled)
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15. (canceled)
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16. A device for producing an image of an object using a particle beam that is scanned over the object, comprising:
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at least one particle beam generator for producing a particle beam; at least one scanner for scanning the particle beam over the object; at least one parameter determining device for determining a parameter that is assigned to the particle beam; at least one change determining device for determining that a change has occurred in the parameter; at least one location determining device for determining a location on the object at which the change occurred in the parameter; and at least one returning device for returning the particle beam to the location. - View Dependent Claims (17, 18, 19, 20, 21, 22, 23, 24, 25, 26, 27, 29, 30, 31, 32)
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28. (canceled)
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33. An electron beam device for producing an image of an object using an electron beam that is scanned over the object, comprising:
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at least one electron beam generator for producing an electron beam; at least one objective lens for focusing the electron beam on the object; at least one scanner for scanning the electron beam over the object; at least one parameter determining device for determining a parameter that is assigned to the electron beam; at least one change determining device for determining that a change has occurred in the parameter; at least one location determining device for determining a location on the object at which the change occurred in the parameter; and at least one returning device for returning the electron beam to the location. - View Dependent Claims (34)
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Specification