METHOD AND SYSTEM FOR DIRECTIONAL GROWTH USING A GAS CLUSTER ION BEAM
First Claim
1. A method for growing material on a substrate having a plurality of surfaces including one or more first surfaces lying substantially parallel to a first plane and one or more second surfaces lying substantially perpendicular to said first plane, the method comprising:
- directing a gas cluster ion beam (GCIB) formed from a source of precursor for a thin film toward said substrate with a direction of incidence; and
orienting said substrate relative to said direction of incidence such that said first plane is substantially perpendicular to said direction of incidence to directionally grow said thin film on said one or more first surfaces oriented substantially perpendicular to said direction of incidence, while substantially avoiding growth of said thin film on said one or more second surfaces oriented substantially parallel to said direction of incidence,wherein said growth of said thin film comprises constituents from said source of precursor and constituents from said substrate.
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0 Petitions
Accused Products
Abstract
A method for growing material on a substrate is described. The method comprises directionally growing a thin film on one or more surfaces of a substrate using a gas cluster ion beam (GCIB) formed from a source of precursor for the thin film, wherein the growth occurs on surfaces oriented substantially perpendicular to the direction of incidence of the GCIB, and growth is substantially avoided on surfaces oriented substantially parallel to the direction of incidence.
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Citations
22 Claims
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1. A method for growing material on a substrate having a plurality of surfaces including one or more first surfaces lying substantially parallel to a first plane and one or more second surfaces lying substantially perpendicular to said first plane, the method comprising:
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directing a gas cluster ion beam (GCIB) formed from a source of precursor for a thin film toward said substrate with a direction of incidence; and orienting said substrate relative to said direction of incidence such that said first plane is substantially perpendicular to said direction of incidence to directionally grow said thin film on said one or more first surfaces oriented substantially perpendicular to said direction of incidence, while substantially avoiding growth of said thin film on said one or more second surfaces oriented substantially parallel to said direction of incidence, wherein said growth of said thin film comprises constituents from said source of precursor and constituents from said substrate. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13, 14, 16, 18, 19, 20, 21, 22)
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15. (canceled)
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17. (canceled)
Specification