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METHODS FOR FORMING AN AMORPHOUS SILICON FILM IN DISPLAY DEVICES

  • US 20090315030A1
  • Filed: 06/17/2009
  • Published: 12/24/2009
  • Est. Priority Date: 06/24/2008
  • Status: Active Grant
First Claim
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1. A method of depositing an amorphous layer, comprising:

  • providing a substrate into a deposition chamber;

    supplying a gas mixture having a hydrogen gas to silane gas ratio by volume greater than 4 into the deposition chamber;

    maintaining a pressure of the gas mixture at greater than about 1 Torr in the deposition chamber; and

    forming an amorphous silicon film on the substrate in the presence of the gas mixture, wherein the amorphous silicon film is configured to be an intrinsic-type layer in a photodiode sensor.

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