NITRIDE SEMICONDUCTOR LIGHT EMITTING DEVICE AND METHOD OF MANUFACTURING THE SAME
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Abstract
There are provided a nitride semiconductor light emitting device and a method of manufacturing the same, the device including: a first conductivity type nitride semiconductor layer formed on a substrate; an active layer formed on the first conductivity type nitride semiconductor layer; a second conductivity type nitride semiconductor layer formed on the active layer; a light-transmitting low refractive index layer formed on the second conductivity type nitride semiconductor layer, the light-transmitting low refractive index layer having a plurality of openings through which the second conductivity type nitride semiconductor layer is partially exposed and formed of a material having a refractive index lower than a refractive index of the second conductivity type nitride semiconductor layer; and a high conductivity ohmic contact layer formed on the light-transmitting low refractive index layer and connected to the second conductivity type nitride semiconductor layer through the openings of the light-transmitting low refractive index layer.
16 Citations
22 Claims
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1-10. -10. (canceled)
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11. A nitride semiconductor light emitting device comprising:
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a first conductivity type nitride semiconductor layer formed on a substrate; an active layer formed on the first conductivity type nitride semiconductor layer; a second conductivity type nitride semiconductor layer formed on the active layer; a high reflectivity ohmic contact layer formed on the second conductivity type nitride semiconductor layer; and a plurality of vacant structures having a refractive index lower than a refractive index of the second conductivity type nitride semiconductor layer, and formed at least one of inside the second conductivity type nitride semiconductor layer and between the high reflectivity ohmic contact layer and the second conductivity type nitride semiconductor layer. - View Dependent Claims (12, 13, 14, 15, 16)
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17. A method of manufacturing a nitride semiconductor light emitting device, the method comprising:
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forming a first conductivity nitride semiconductor layer on a substrate; forming an active layer on the first conductivity type nitride semiconductor layer; forming a second conductivity type nitride semiconductor layer formed on the active layer; forming a high reflectivity ohmic contact layer on the second conductivity nitride semiconductor layer; and forming a plurality of vacant structures at least one of inside the second conductivity type nitride semiconductor layer and between the high reflectivity ohmic contact layer and the second conductivity type nitride semiconductor layer. - View Dependent Claims (18, 19, 20, 21, 22)
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Specification