INTEGRATED THREE-DIMENSIONAL MAGNETIC SENSING DEVICE AND METHOD TO FABRICATE AN INTEGRATED THREE-DIMENSIONAL MAGNETIC SENSING DEVICE

• US 20090315554A1
• Filed: 06/20/2008
• Published: 12/24/2009
• Est. Priority Date: 06/20/2008
• Status: Abandoned Application

• Current Assignee: Honeywell International Inc.
• Original Assignee: Honeywell International Inc.
• Inventors: Witcraft, William, Ohnstein, Thomas, Keyser, Thomas
• Application Number:
  US12/143,380
• Publication Number:
  US 20090315554A1
• Time in Patent Office: Days
• US Class Current: 324/260
• CPC Class Codes: G01R 33/02 Measuring direction or magnitude of magnetic fields or magnetic flux G01R33/20 takes precedence
• CPC Class Codes: G01R 33/0206 Three-component magnetometers

Abstract

A three-axis magnetic sensing device included on a single chip. An example three-axis magnetic sensing device includes first and second sensing components that sense magnetic fields along two orthogonal axes planar to a surface of a substrate and a third sensing component that senses a magnetic field along an axis out of plane of the surface of the substrate. The third sensing component includes a carbon-based material. In one example, the first and second sensing components are anisotropic magnetoresistive sensors. In another example, the carbon-based material includes carbon nanotubes and the third sensing component includes a needle attached to the carbon-based material and electrodes that make contact with the carbon-based material.

Claims

1. A three-axis magnetic sensing device comprising:

first and second sensing components configured to sense magnetic fields along two orthogonal axes planar to a surface of a substrate; and

a third sensing component configured to sense a magnetic field along an axis out of plane of the surface of the substrate,

wherein the third sensing component includes a carbon-based material.

2. The device of claim 1, wherein the first and second sensing components comprise anisotropic magnetoresistive sensors.

3. The device of claim 2, wherein the carbon-based material comprises carbon nanotubes.

4. The device of claim 3, wherein the third sensing component includes a needle attached to the carbon-based material.

5. The device of claim 4, wherein the needle comprises ferromagnetic material.

6. The device of claim 4, wherein the third sensing component further comprises at least two electrodes that make contact with the carbon-based material.

7. The device of claim 1, wherein the carbon-based material comprises carbon nanotubes.

8. The device of claim 1, wherein the third sensing component includes a needle attached to the carbon-based material.

9. The device of claim 1, further comprising:

a layer located at least one of adjacent to or underneath the sensing components, the layer includes integrated circuit components being in signal communication with the sensing components.

10. A method of making a three-axis magnetic sensing device, the method comprising:

forming first and second sensing components on a surface of a substrate, the first and second sensing components configured to sense magnetic fields along two orthogonal axes planar to the surface of the substrate; and

forming a third sensing component on the substrate, the third sensing component configured to sense a magnetic field along an axis out of plane of the surface of the substrate,

wherein the third sensing component includes a carbon-based material.

11. The method of claim 10, wherein the first and second sensing components comprise anisotropic magnetoresistive sensors.

12. The method of claim 11, wherein the carbon-based material comprises carbon nanotubes.

13. The method of claim 12, wherein forming the third sensing component comprises attaching a needle to the carbon-based material.

14. The method of claim 13, wherein the needle comprises ferromagnetic material.

15. The method of claim 13, wherein forming the third sensing component comprises forming at least two electrodes on the surface, wherein the at least two electrodes make contact with the carbon-based material.

16. The method of claim 10, wherein the carbon-based material comprises carbon nanotubes.

17. The method of claim 10, wherein forming the third sensing component comprises attaching a needle to the carbon-based material.

18. The method of claim 10, further comprising:

forming integrated circuit components into a layer located at least one of adjacent to or underneath the sensing components, wherein the integrated circuit components are in signal communication with the sensing components.