CHUCK FOR SUPPORTING AND RETAINING A TEST SUBSTRATE AND A CALIBRATION SUBSTRATE
First Claim
1. A chuck for supporting and retaining a test substrate, the chuck having a device for supporting and retaining a calibration substrate having a planar calibration standard and the device comprising the following components:
- a first support surface for supporting a test substrate,the first support surface being temperature controlled using a temperature control device for heating and/or cooling the test substrate,a second support surface laterally offset to the first support surface, for supporting the calibration substrate,the second support surface being temperature controlled using a temperature control device for heating and/or cooling the calibration substrate, anddielectric material or air being situated in the second support surface in an area below the calibration substrate at least in an area of the calibration standard.
5 Assignments
0 Petitions
Accused Products
Abstract
A chuck for supporting and retaining a test substrate includes a device for supporting and retaining a calibration substrate. The chuck comprises a first support surface for supporting a test substrate and a second support surface, which is laterally offset to the first support surface, for supporting a calibration substrate The calibration substrate has planar calibration standards for calibration of a measuring unit of a prober, and dielectric material or air situated below the calibration substrate at least in the area of the calibration standard. In order to be able to take the actual thermal conditions on the test substrate and in particular also on known and unknown calibration standards and thus the thermal influence on the electrical behavior of the calibration standard used into consideration, the second support surface is equipped for temperature control of the calibration substrate.
13 Citations
19 Claims
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1. A chuck for supporting and retaining a test substrate, the chuck having a device for supporting and retaining a calibration substrate having a planar calibration standard and the device comprising the following components:
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a first support surface for supporting a test substrate, the first support surface being temperature controlled using a temperature control device for heating and/or cooling the test substrate, a second support surface laterally offset to the first support surface, for supporting the calibration substrate, the second support surface being temperature controlled using a temperature control device for heating and/or cooling the calibration substrate, and dielectric material or air being situated in the second support surface in an area below the calibration substrate at least in an area of the calibration standard. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13, 15, 16, 17, 18, 19)
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14. A checking station for checking test substrates, comprising:
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a chuck for supporting and retaining a test substrate, probe tips for supplying test signals into the test substrate or tapping test signals from the test substrate; a measuring unit for performing a measurement, wherein the chuck has a device for supporting and retaining a calibration substrate having a planar calibration standard, the device comprising the following components, a first support surface for supporting the test substrate, the first support surface being temperature controlled using a temperature control device for heating and/or cooling the test substrate, a second support surface laterally offset to the first support surface, for supporting a calibration substrate, the second support surface being temperature controlled using a temperature control device for heating and/or cooling the calibration substrate, and dielectric material or air being situated in the second support surface in an area below the calibration substrate at least in an area of a calibration standard.
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Specification